QQ客服 官方微博 反馈留言

	Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE)
	Liang F. ; Hu J.
	2006
会议名称	ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005
会议地点	Changchun, China
关键词	The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS several key techniques as follows are introduced. Firstly the unique system configuration four axes mutually intersecting at the center of the SS is adopted which ensures the shape of the focus be maintained circular during the writing period. Secondly an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly to guarantee the linear velocity to accord with the exposure character of the photoresist all the time an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m and the steep sides of the lines are parallel to each other.
收录类别	EI
内容类型	会议论文
源URL	[http://ir.ciomp.ac.cn/handle/181722/33644]
专题	长春光学精密机械与物理研究所_中科院长春光机所知识产出_会议论文
推荐引用方式 GB/T 7714	Liang F.,Hu J.. Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE)[C]. 见:ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005. Changchun, China.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。