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CORC

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Fabrication of ultra-high aspect ratio silicon grating using an alignment method based on a scanning beam interference lithography system 期刊论文
Optics Express, 2022, 卷号: 30, 期号: 22, 页码: 40842-40853
作者:  X. S. Chen;  S. Jiang;  Y. B. Li;  Y. X. Jiang;  W. Wang and Bayanheshig
收藏  |  浏览/下载：0/0  |  提交时间：2023/06/14
Uniform Metal-Assisted Chemical Etching for Ultra-High-Aspect-Ratio Microstructures on Silicon 期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2019, 卷号: 28, 期号: 1, 页码: 143-153
作者:  Li, Liyi;  Tuan, Chia-Chi;  Zhang, Cheng;  Chen, Yun;  Lian, Gang
收藏  |  浏览/下载：15/0  |  提交时间：2019/12/11
Uniform Metal-Assisted Chemical Etching for Ultra-High-Aspect-Ratio Microstructures on Silicon 期刊论文
Journal of Microelectromechanical Systems, 2018
作者:  Li L.
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/11
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing 期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:  Yu, Mingxing;  Lv, Pin;  Xu, Tiantong;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/30
Micropatterning microlens arrays fabricated by a femtosecond laser wet etch process 会议论文
作者:  Wei, Yang;  Yang, Qing;  Bian, Hao;  Chen, Feng
收藏  |  浏览/下载：8/0  |  提交时间：2019/11/26
Novel combined through-wafer-groove fabrication approach and its application in wafer level packaging of gaas ccd 期刊论文
Microsystem technologies-micro-and nanosystems-information storage and processing systems, 2016, 卷号: 22, 期号: 8, 页码: 1983-1989
作者:  Ye, Jiaotuo;  Wang, Shuangfu;  Zhu, Chunsheng;  Xu, Gaowei;  Luo, Le
收藏  |  浏览/下载：20/0  |  提交时间：2019/05/09
Preparation of silicon nanowires by in situ doping and their electrical properties 期刊论文
COLLOIDS AND SURFACES A-PHYSICOCHEMICAL AND ENGINEERING ASPECTS, 2014, 卷号: 450, 页码: 156-160
作者:  Wang, Jindong;  He, Gen;  Qin, Jinwen;  Li, Lidong;  Guo, Xuefeng
收藏  |  浏览/下载：16/0  |  提交时间：2019/04/09
Preparation of silicon nanowires by in situ doping and their electrical properties 期刊论文
colloids and surfaces a physicochemical and engineering aspects, 2014
Wang, Jindong; He, Gen; Qin, Jinwen; Li, Lidong; Guo, Xuefeng
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/11
Deep Wet Etching in Hydrofluoric Acid, Nitric Acid, and Acetic Acid of Cavities in a Silicon Wafer 期刊论文
JAPANESE JOURNAL OF APPLIED PHYSICS, 2013
作者:  Zhou Yifan;  Chen Sihai;  Samson Edmond;  Alain Bosseboeuf
收藏  |  浏览/下载：18/0  |  提交时间：2015/08/28
Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications 期刊论文
Microsystem Technologies, 2012, 期号: 7
作者:  Jiadong Li（李加东）;  Dongmin Wu(吴东岷);  Dongmin Wu(吴东岷)
收藏  |  浏览/下载：14/0  |  提交时间：2013/01/25

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