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CORC

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Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N-2/O-2 期刊论文
PHYSICS OF PLASMAS, 2018, 卷号: 25
作者:  Jia, Wen-Zhu;  Liu, Rui-Qiang;  Wang, Xi-Feng;  Liu, Xiang-Mei;  Song, Yuan-Hong
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Experimental investigation of mode transitions in asymmetric capacitively coupled radio-frequency Ne and CF4 plasmas 期刊论文
PHYSICS OF PLASMAS, 2018, 卷号: 25, 页码: -
作者:  Liu, Gang-Hu;  Liu, Yong-Xin;  Bai, Li-Shui;  Zhao, Kai;  Wang, You-Nian
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/02
Striations in electronegative capacitively coupled radio-frequency plasmas: analysis of the pattern formation and the effect of the driving frequency 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 卷号: 26
作者:  Liu, Yong-Xin;  Korolov, Ihor;  Schuengel, Edmund;  Wang, You-Nian;  Donko, Zoltan
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Striations in electronegative capacitively coupled radio-frequency plasmas: Effects of the pressure, voltage, and electrode gap 期刊论文
PHYSICS OF PLASMAS, 2017, 卷号: 24, 页码: -
作者:  Liu, Yong-Xin;  Korolov, Ihor;  Schungel, Edmund;  Wang, You-Nian;  Donko, Zoltan
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02
Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure 期刊论文
CHINESE PHYSICS B, 2017, 卷号: 26
作者:  Samir, Tagra;  Liu, Yue;  Zhao, Lu-Lu;  Zhou, Yan-Wen
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/03
Advanced fluid modeling and PIC/MCC simulations of low-pressure ccrf discharges 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2017, 卷号: 26
作者:  Becker, M. M.;  Kaehlert, H.;  Sun, A.;  Bonitz, M.;  Loffhagen, D.
收藏  |  浏览/下载：3/0  |  提交时间：2019/11/26
Experimental Observation and Computational Analysis of Striations in Electronegative Capacitively Coupled Radio-Frequency Plasmas 期刊论文
PHYSICAL REVIEW LETTERS, 2016, 卷号: 116, 页码: 255002
作者:  Liu, Yong-Xin;  Schungel, Edmund;  Korolov, Ihor;  Donko, Zoltan;  Wang, You-Nian
收藏  |  浏览/下载：2/0  |  提交时间：2019/12/09
The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH4/NH3/N-2 plasmas: Two-dimensional simulations 期刊论文
CHINESE PHYSICS B, 2013, 卷号: 22, 页码: -
作者:  Liu Xiang-Mei;  Song Yuan-Hong;  Jiang Wei;  Yi Lin
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/11
Microplasma Technology and Its Applications in Analytical Chemistry 期刊论文
applied spectroscopy reviews, 2011, 卷号: 46, 期号: 7, 页码: 581-605
作者:  Yuan, Xin;  Tang, Jie;  Duan, Yixiang
收藏  |  浏览/下载：17/0  |  提交时间：2012/06/29
Phase-shift effect in capacitively coupled plasmas with two radio frequency or very high frequency sources 期刊论文
JOURNAL OF APPLIED PHYSICS, 2010, 卷号: 108
作者:  Xu, Xiang;  Zhao, Shu-Xia;  Zhang, Yu-Ru;  Wang, You-Nian
收藏  |  浏览/下载：1/0  |  提交时间：2019/12/24

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