| Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure | |
| Samir, Tagra; Liu, Yue; Zhao, Lu-Lu; Zhou, Yan-Wen | |
| 刊名 | CHINESE PHYSICS B
 |
| 2017 | |
| 卷号 | 26 |
| 关键词 | capacitively coupled plasmas electron heating radio frequency (RF) glow discharges driving frequency |
| ISSN号 | 1674-1056 |
| URL标识 | 查看原文 |
| WOS记录号 | [DB:DC_IDENTIFIER_WOSID] |
| 内容类型 | 期刊论文 |
| URI标识 | http://www.corc.org.cn/handle/1471x/3309787 |
| 专题 | 大连理工大学 |
| 作者单位 | 1.Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. 2.Dalian Univ Technol, Sch Phys, Minist Educ, Key Lab Mat Modificat Laser Ion & Electron Beams, Dalian 116024, Peoples R China. 3.Dalian Polytech Univ, Sch Informat Sci & Engn, Dalian 116034, Peoples R China. 4.Univ Sci & Technol Liaoning, Sch Mat & Met, Anshan 114051, Peoples R China. |
| 推荐引用方式 GB/T 7714 | Samir, Tagra,Liu, Yue,Zhao, Lu-Lu,et al. Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure[J]. CHINESE PHYSICS B,2017,26. |
| APA | Samir, Tagra,Liu, Yue,Zhao, Lu-Lu,&Zhou, Yan-Wen.(2017).Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure.CHINESE PHYSICS B,26. |
| MLA | Samir, Tagra,et al."Effect of driving frequency on electron heating in capacitively coupled RF argon glow discharges at low pressure".CHINESE PHYSICS B 26(2017). |
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