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The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials 期刊论文
PHYSICS OF PLASMAS, 2019, 卷号: 26
作者:  Sun, Jing-Yu;  Wen, De-Qi;  Zhang, Quan-Zhi;  Liu, Yong-Xin;  Wang, You-Nian
收藏  |  浏览/下载：16/0  |  提交时间：2019/12/02
Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:  Wang, Li;  Wen, De-Qi;  Zhang, Quan-Zhi;  Song, Yuan-Hong;  Zhang, Yu-Ru
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/02
Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate 期刊论文
AIP ADVANCES, 2019, 卷号: 9
作者:  Wen, Ying-Ying;  Zhang, Yu-Ru;  Jiang, Ge;  Song, Yuan-Hong;  Wang, You-Nian
收藏  |  浏览/下载：7/0  |  提交时间：2019/12/02
Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance- Enhanced Harmonics in Capacitive Discharges 期刊论文
PHYSICAL REVIEW LETTERS, 2019, 卷号: 122, 页码: 185002
作者:  Zhao, Kai;  Wen, De-Qi;  Liu, Yong-Xin;  Lieberman, Michael A.;  Economou, Demetre J.
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma 期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 卷号: 52
作者:  Jia, Wen-Zhu;  Zhang, Quan-Zhi;  Wang, Xi-Feng;  Song, Yuan-Hong;  Zhang, Ying-Ying
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/02
Striations in dual-frequency capacitively coupled CF4 plasmas: the role of the high-frequency voltage amplitude 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:  Liu, Yong-Xin;  Donko, Zoltan;  Korolov, Ihor;  Schungel, Edmund;  Wang, You-Nian
收藏  |  浏览/下载：10/0  |  提交时间：2019/12/02
Magnetical asymmetry effect in capacitively coupled plasmas: effects of the magnetic field gradient, pressure, and gap length 期刊论文
Plasma Sources Science and Technology, 2018, 卷号: 27, 期号: 3
作者:  Yang, Shali;  Chang, Lijie;  Zhang, Ya*;  Jiang, Wei*
收藏  |  浏览/下载：6/0  |  提交时间：2019/12/04
Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N-2/O-2 期刊论文
PHYSICS OF PLASMAS, 2018, 卷号: 25
作者:  Jia, Wen-Zhu;  Liu, Rui-Qiang;  Wang, Xi-Feng;  Liu, Xiang-Mei;  Song, Yuan-Hong
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/02
Effects of secondary electron emission on plasma density and electron excitation dynamics in dual-frequency asymmetric capacitively coupled argon plasmas 期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 卷号: 27
作者:  Liu, Gang-Hu;  Wang, Xiang-Yu;  Liu, Yong-Xin;  Sun, Jing-Yu;  Wang, You-Nian
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/02
Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling 期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2018, 卷号: 46, 页码: 1738-1746
作者:  Samir, Tagra;  Liu, Yue;  Zhao, Lulu
收藏  |  浏览/下载：9/0  |  提交时间：2019/12/02

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