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浏览/检索结果: 共7条，第1-7条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Interference Fringe Locking by Grating-Shifting Holographic Grating Exposure 期刊论文 Zhongguo Jiguang/Chinese Journal of Lasers, 2017, 卷号: 44, 期号: 5 作者:  Song, Y.;  X. Zhao;  Y. Jiang;  Bayanheshig and X. Qi 收藏  |  浏览/下载：15/0  |  提交时间：2018/06/13 The leveling of mask and wafer in proximity nanolithography using fringe pattern phase analysis 期刊论文 OPTIK, 2014, 卷号: 125, 期号: 13, 页码: 3176-3180 作者:  Xu, Feng;  Zhou, Shaolin;  Hu, Song 收藏  |  浏览/下载：15/0  |  提交时间：2015/07/10 Nanolithography  Leveling  Fringe pattern analysis  Phase extraction   Influence of tilt moire fringe on alignment accuracy in proximity lithography 期刊论文 OPTICS AND LASERS IN ENGINEERING, 2013, 卷号: 51, 期号: 4, 页码: 371-381 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan;  Xu, Feng 收藏  |  浏览/下载：16/0  |  提交时间：2015/04/17 Angular displacement  Phase  Tilt moire fringe  Lithography alignment  Linear displacement   Influence of tilt moiré fringe on alignment accuracy in proximity lithography 期刊论文 Optics and Lasers in Engineering, 2013, 卷号: 51, 期号: 4, 页码: 371-381 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan;  Xu, Feng 收藏  |  浏览/下载：8/0  |  提交时间：2016/11/23 Alignment method based on matched dual-grating moire fringe for proximity lithography 期刊论文 OPTICAL ENGINEERING, 2012, 卷号: 51, 期号: 11 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan 收藏  |  浏览/下载：17/0  |  提交时间：2015/07/10 lithography alignment  moire fringe  angular displacement   Alignment method based on matched dual-grating moiré fringe for proximity lithography 期刊论文 Optical Engineering, 2012, 卷号: 51, 期号: 11, 页码: 113603 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan 收藏  |  浏览/下载：13/0  |  提交时间：2016/11/23 Grating interferometry method for torsion measurement (EI CONFERENCE) 会议论文 ICO20: Optical Information Processing, August 21, 2005 - August 26, 2005, Changchun, China Li X.-R.; Qiao Y.-F.; Liu W.; Zhang Y.-Y. 收藏  |  浏览/下载：21/0  |  提交时间：2013/03/25 Method of grating interferometry was presented for torsion angle measurement  moire fringe generated by two gratings is used in a new field  it breaks through moire fringe's routine application. Measurement principle is described  torsion angle can be gotten by the tilt angle or the width of moire fringe. Different from moire fringe's characteristic information extracting methods in traditional measurement fields  fringe-tilt method and fringe-width method were put forward to extract moire fringe's characteristic information. Fringe-tilt method is on the basis of moire fringe's tilt to acquire torsion angle  uniform formula was built aiming at all positions of two gratings in the coordinates  fringe-width method is on the basis of moire fringe's width to acquire torsion angle  three key problems are given about fringe-width method. Thick  middle and thin moire fringe were collected in experiments and processed by two methods  fringe-width method's result shows that magnitude of boat torsion error is satisfied with that of theoretical precision analysis  and the change rule of torsion error is also same to that of theoretical analysis  the thicker fringe is  the higher precision is  when fringe width arrives to be 1695m  the precision is 1.7"  the thinner fringe is  the lower precision is  when fringe width arrives to be 734.7m  the precision is 6.7". In addition to these  the results of repeatability experiments  sensibility experiments are given. In a word  the measurement principle is right and the precision of fringe processing is also reliable.