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长春光学精密机械与物... [1]
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会议论文 [1]
发表日期
2010 [1]
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In situ long trace profiler for measurement of Wolter type-I mirror (EI CONFERENCE)
会议论文
Advances in Metrology for X-Ray and EUV Optics III, August 1, 2010 - August 2, 2010, San Diego, CA, United states
Cui T. G.
;
Wang Y. G.
;
Ma W. S.
;
Chen B.
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提交时间:2013/03/25
The surface profile of Wolter type-I mirror has a great impact on the performance of Solar X-ray Telescope. According to the existing fabrication instrument and experimental conditions in our lab
an in situ Long Trace Profiler is developed and set up on the fabrication instrument in order to measure the surface profile of Wolter mirror in real time during fabrication process. Its working mechanism
structural parameters and data processing algorithm are investigated. The prototype calibrated by a standard plane mirror is used to measure a sample of Wolter type-I mirror. The results show that our prototype can achieve an accuracy of 2.6rad rms for slope error with a stability of 1.33rad during the whole measurement period. This can meet further fabrication requirements. 2010 Copyright SPIE - The International Society for Optical Engineering.
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