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CORC

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Thermal-Mechanical Reliability Analysis of Connection Structure between Redistribution Layer and TSV for MEMS Packaging 其他
2016-01-01
Meng, Wei; Zeng, Qinghua; Guan, Yong; Chen, Jing; Jin, Yufeng
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
NEMS VARIABLE OPTICAL ATTENUATOR (VOA) DRIVEN BY OPTICAL FORCE 其他
2015-01-01
Dong, B.; Cai, H.; Gu, Y. D.; Yang, Z. C.; Jin, Y. F.; Hao, Y. L.; Kwong, D. L.; Liu, A. Q.
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Study on compatible CMOS-MEMS process with surface micromachining for the application of monolithic integration 其他
2014-01-01
Zhao, Danqi; Huang, Xian; He, Jun; Zhang, Li; Liu, Peng; Yang, Fang; Zhang, Dacheng
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
Post-CMOS Integration of MEMS Inertial Sensors Using Oxidized Porous Silicon Technique 会议论文
CHEMICAL AND BIOLOGICAL SENSORS 11 -AND- MEMS-NEMS 11, 2014-01-01
作者:  Ge, Daohan[1];  Ren, Naifei[2]
收藏  |  浏览/下载：4/0  |  提交时间：2019/12/24
Investigations of Silicon Wafer Bonding Using Thin Al and Sn Films for Heterogeneous Integration 其他
2013-01-01
Zhu, Zhiyuan; Wang, Shaonan; Xu, Yichao; Wang, Guanjiang; Pi, Yudan; Wang, Peiquan; Zhu, Yunhui; Sun, Xin; Yu, Min; Chen, Jing; Miao, Min; Jin, Yufeng
收藏  |  浏览/下载：5/0  |  提交时间：2015/11/13
A facile nanowire fabrication approach based on edge lithography 其他
2012-01-01
Liu, Yaoping; Wang, Wei; Zhang, Haixia Alice; Wu, Wengang; Li, Zhihong
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
Post CMOS integration of high aspect ratio SOI MEMS devices 其他
2011-01-01
Sun, L.N.; Qian, L.; Hong, P.Z.; Yan, G.Z.; Yang, Z.C.
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
Direct Al-Al contact in silicon-Pyrex7740 anodic bonding for hermetic package and electrical interconnecting 其他
2011-01-01
Zheng, Xiaoshan; Yan, Xin; Song, Zijun; San, Haisheng; Chen, Xuyu; 伞海生; 陈旭远
收藏  |  浏览/下载：3/0  |  提交时间：2015/07/22
A fast and low power consuming double stability MEMS microrelay 期刊论文
2010, 2010
Li Hui-juan; You Zheng; Zhang Gao-fei; Yang Jian-zhong
收藏  |  浏览/下载：37/0
Fabrication of micro/nano-filter by building sacrificial structure with colloid crystal 其他
2010-01-01
Ma, Ruilin; Wang, Wei; Wu, Wengang
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13

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