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Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching 期刊论文
SENSORS AND MATERIALS, 2018, 卷号: 30, 页码: 2747-2760
作者:  Yan, Haixia;  Bao, Jinyan;  Yu, Quan;  Dong, Linxi
收藏  |  浏览/下载：13/0  |  提交时间：2019/11/26
Fabrication and Characterization of Fine Pitch TSV Integration with Self-aligned Backside Insulation Layer Opening 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Parametric Study of DRIE Process for Enhancing the Profile-preserving Property of Square Through Silicon Via 其他
2016-01-01
Guan, Yong; Zeng, Qinghua; Chen, Jing; Ma, Shenglin; Meng, Wei; Jin, Yufeng
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Formation mechanism of multi-functional black silicon based on optimized deep reactive ion etching technique with SF6/C4F8 期刊论文
science china technological sciences, 2015
Zhu FuYun; Zhang XiaoSheng; Zhang HaiXia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10
Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures 期刊论文
微电子工程, 2015
Zhang, Xiao-Sheng; Su, Zong-Ming; Han, Meng-Di; Meng, Bo; Zhu, Fu-Yun; Zhang, Hai-Xia
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/10
A THREE-STEP MODEL OF BLACK SILICON FORMATION IN DEEP REACTIVE ION ETCHING PROCESS 其他
2015-01-01
Zhu, Fuyun; Wang, Chen; Zhang, Xiaosheng; Zhao, Xin; Zhang, Haixia
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
A novel MOS radiation dosimeter based on the MEMS-made oxide layer 其他
2015-01-01
Liu, H.; Yang, Y.; Zhang, J.
收藏  |  浏览/下载：5/0  |  提交时间：2017/12/03
Improvement of DRIE simulation method for process development application 其他
2015-01-01
Du, Hong; Yu, Min; Qi, Lin; Zhu, Zhiyuan; Wang, Hao; Zhang, Haixia; Jin, Yufeng; Shi, Baohua; Zhang, Zhao
收藏  |  浏览/下载：3/0  |  提交时间：2017/12/03
Improvement of DRIE simulation method for process development application 其他
2015-01-01
Du, Hong; Yu, Min; Qi, Lin; Zhu, Zhiyuan; Wang, Hao; Zhang, Haixia; Jin, Yufeng; Shi, Baohua; Zhang, Zhao
收藏  |  浏览/下载：4/0  |  提交时间：2017/12/03
Fabrication and characterization of the functional parylene-C film with micro/nano hierarchical structures 其他
2015-01-01
Zhang, Xiao-Sheng; Su, Zong-Ming; Han, Meng-Di; Meng, Bo; Zhu, Fu-Yun; Zhang, Hai-Xia
收藏  |  浏览/下载：6/0  |  提交时间：2017/12/04

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