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The effects of electron surface interactions in geometrically symmetric capacitive RF plasmas in the presence of different electrode surface materials
期刊论文
PHYSICS OF PLASMAS, 2019, 卷号: 26
作者:
Sun, Jing-Yu
;
Wen, De-Qi
;
Zhang, Quan-Zhi
;
Liu, Yong-Xin
;
Wang, You-Nian
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2019/12/02
Copper compounds
Electric discharges
Electric grounding
Electrodes
Ionization
Plasma simulation
Secondary emission
Silica
Silicon oxides, Asymmetric response
Backscattered electrons
Capacitively coupled plasmas
Grounded electrodes
Plasma characteristics
Secondary electron emissions
Secondary electron yield
Secondary electrons, Electrons
Disruption of self-organized striated structure induced by secondary electron emission in capacitive oxygen discharges
期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:
Wang, Li
;
Wen, De-Qi
;
Zhang, Quan-Zhi
;
Song, Yuan-Hong
;
Zhang, Yu-Ru
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/12/02
capacitively coupled oxygen plasma
secondary electron emission
striations
electron heating mode transition
Secondary electron effect on sustaining capacitively coupled discharges: A hybrid modeling investigation of the ionization rate
期刊论文
AIP ADVANCES, 2019, 卷号: 9
作者:
Wen, Ying-Ying
;
Zhang, Yu-Ru
;
Jiang, Ge
;
Song, Yuan-Hong
;
Wang, You-Nian
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/02
Aspect ratio
Electric discharges
Energy dissipation
Etching
Ionization
Secondary emission, Capacitively coupled discharges
Discharge parameters
High-aspect-ratio-etching
Ionization rates
Plasma generation
Pressure increase
Secondary electrons
Voltage increase, Electrons
Observation of Nonlinear Standing Waves Excited by Plasma-Series-Resonance- Enhanced Harmonics in Capacitive Discharges
期刊论文
PHYSICAL REVIEW LETTERS, 2019, 卷号: 122, 页码: 185002
作者:
Zhao, Kai
;
Wen, De-Qi
;
Liu, Yong-Xin
;
Lieberman, Michael A.
;
Economou, Demetre J.
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
Elastic waves
Electric discharges
Plasma density
Resonance
Standing wave meters, Capacitive discharges
Capacitively coupled plasmas
High order harmonics
Higher harmonics
Nonlinear standing waves
Plasma series resonance
Spatial structure
Very high frequency, Harmonic analysis, article
electromagnetism
excitation
human tissue
hypobarism
magnetic field
motion
plasma
simulation
Effect of dust particle size on the plasma characteristics in a radio frequency capacitively coupled silane plasma
期刊论文
JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2019, 卷号: 52
作者:
Jia, Wen-Zhu
;
Zhang, Quan-Zhi
;
Wang, Xi-Feng
;
Song, Yuan-Hong
;
Zhang, Ying-Ying
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/12/02
dust plasma
electron heating mechanism
hybrid fluid/MC model
Striations in dual-frequency capacitively coupled CF4 plasmas: the role of the high-frequency voltage amplitude
期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2019, 卷号: 28
作者:
Liu, Yong-Xin
;
Donko, Zoltan
;
Korolov, Ihor
;
Schungel, Edmund
;
Wang, You-Nian
收藏
  |  
浏览/下载:10/0
  |  
提交时间:2019/12/02
striations
electronegative plasma
low pressure
capacitively coupled RF discharge
Magnetical asymmetry effect in capacitively coupled plasmas: effects of the magnetic field gradient, pressure, and gap length
期刊论文
Plasma Sources Science and Technology, 2018, 卷号: 27, 期号: 3
作者:
Yang, Shali
;
Chang, Lijie
;
Zhang, Ya*
;
Jiang, Wei*
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/12/04
magnetical asymmetric effect
magnetized capacitively coupled plasma
particle-in-cell/Monte Carlo collision simulation
Two-dimensional fluid simulation of a radio frequency capacitively coupled plasma in SiH4/N-2/O-2
期刊论文
PHYSICS OF PLASMAS, 2018, 卷号: 25
作者:
Jia, Wen-Zhu
;
Liu, Rui-Qiang
;
Wang, Xi-Feng
;
Liu, Xiang-Mei
;
Song, Yuan-Hong
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
Effects of secondary electron emission on plasma density and electron excitation dynamics in dual-frequency asymmetric capacitively coupled argon plasmas
期刊论文
PLASMA SOURCES SCIENCE & TECHNOLOGY, 2018, 卷号: 27
作者:
Liu, Gang-Hu
;
Wang, Xiang-Yu
;
Liu, Yong-Xin
;
Sun, Jing-Yu
;
Wang, You-Nian
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/02
dual-frequency CCRF plasmas
secondary electron emission
hairpin probe
phase resolved optical emission spectroscopy
Study on Effect of Neutral Gas Pressure on Plasma Characteristics in Capacitive RF Argon Glow Discharges at Low Pressure by Fluid Modeling
期刊论文
IEEE TRANSACTIONS ON PLASMA SCIENCE, 2018, 卷号: 46, 页码: 1738-1746
作者:
Samir, Tagra
;
Liu, Yue
;
Zhao, Lulu
收藏
  |  
浏览/下载:9/0
  |  
提交时间:2019/12/02
Capacitively coupled
ohmic heating
plasma discharge
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