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pMOSFETs Featuring ALD W Filling Metal Using SiH4 and B2H6 Precursors in 22 nm Node CMOS Technology 期刊论文
Nanoscale Research Letters, 2017
作者:  Zhao C(赵超);  Wang GL(王桂磊);  Luo J(罗军);  Liu JB(刘金彪);  Yang T(杨涛)
收藏  |  浏览/下载:15/0  |  提交时间:2018/07/05
Integration of Highly Strained SiGe in Source and Drain with HK and MG for 22 nm Bulk PMOS Transistors 期刊论文
Nanoscale Research Letters, 2017
作者:  Wang GL(王桂磊);  Ye TC(叶甜春);  Henry Homayoun Radamson;  Zhao C(赵超);  Zhu HL(朱慧珑)
收藏  |  浏览/下载:12/0  |  提交时间:2018/07/05
Impact of pattern dependency of SiGe layers grown selectively in source/drain on the performance of 22nm node pMOSFETs 期刊论文
Solid-State Electronics, 2015
作者:  Li JF(李俊峰);  Wang GL(王桂磊);  Xu YF(徐烨峰);  Luo J(罗军);  Guo YL(郭奕栾)
收藏  |  浏览/下载:15/0  |  提交时间:2016/05/31
SiGe Selective Epitaxial Growth Process for 22 nm Node CMOS and Beyond 期刊论文
The Electrochemical Society, 2014
作者:  Xu Q(徐强);  Wang GL(王桂磊);  Ye TC(叶甜春);  Luo J(罗军);  Li CL(李春龙)
收藏  |  浏览/下载:14/0  |  提交时间:2015/04/24


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