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A wafer-level Sn-rich Au–Sn intermediate bonding technique with high strength 期刊论文
Journal of Micromechanics and Microengineering, 2013, 卷号: 23, 期号: 9
Zhiqiang Fang, Xu Mao, Jinling Yang and Fuhua Yang
收藏  |  浏览/下载:15/0  |  提交时间:2014/03/26
Two new methods to improve the lithography precision for SU-8 photoresist on glass substrate 期刊论文
proceedings of the ieee international conference on micro electro mechanical systems (mems), 2012, 页码: 337-340
Mao, Xu; Yang, Jinling; Ji, An; Yang, Fuhua
收藏  |  浏览/下载:14/0  |  提交时间:2013/05/07


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