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Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates 期刊论文
MATERIALS CHEMISTRY AND PHYSICS, 2016, 卷号: 172, 页码: 26-31
作者:  Lei, Hong[1];  Tong, Kaiyu[2];  Wang, Zhanyong[3]
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