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Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates
Lei, Hong[1]; Tong, Kaiyu[2]; Wang, Zhanyong[3]
刊名MATERIALS CHEMISTRY AND PHYSICS
2016
卷号172页码:26-31
关键词Composite materials Chemical synthesis Surfaces X-ray photo-emission spectroscopy (XPS)
ISSN号0254-0584
URL标识查看原文
内容类型期刊论文
URI标识http://www.corc.org.cn/handle/1471x/2235978
专题上海大学
作者单位1.[1]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China.
2.Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China.
3.[2]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China.
4.[3]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China.
推荐引用方式
GB/T 7714
Lei, Hong[1],Tong, Kaiyu[2],Wang, Zhanyong[3]. Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates[J]. MATERIALS CHEMISTRY AND PHYSICS,2016,172:26-31.
APA Lei, Hong[1],Tong, Kaiyu[2],&Wang, Zhanyong[3].(2016).Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates.MATERIALS CHEMISTRY AND PHYSICS,172,26-31.
MLA Lei, Hong[1],et al."Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates".MATERIALS CHEMISTRY AND PHYSICS 172(2016):26-31.
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