Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates | |
Lei, Hong[1]; Tong, Kaiyu[2]; Wang, Zhanyong[3] | |
刊名 | MATERIALS CHEMISTRY AND PHYSICS
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2016 | |
卷号 | 172页码:26-31 |
关键词 | Composite materials Chemical synthesis Surfaces X-ray photo-emission spectroscopy (XPS) |
ISSN号 | 0254-0584 |
URL标识 | 查看原文 |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/2235978 |
专题 | 上海大学 |
作者单位 | 1.[1]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China. 2.Shanghai Univ, Res Ctr Nanosci & Nanotechnol, Shanghai 200444, Peoples R China. 3.[2]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China. 4.[3]Shanghai Inst Technol, Sch Mat Sci & Engn, Shanghai 201418, Peoples R China. |
推荐引用方式 GB/T 7714 | Lei, Hong[1],Tong, Kaiyu[2],Wang, Zhanyong[3]. Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates[J]. MATERIALS CHEMISTRY AND PHYSICS,2016,172:26-31. |
APA | Lei, Hong[1],Tong, Kaiyu[2],&Wang, Zhanyong[3].(2016).Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates.MATERIALS CHEMISTRY AND PHYSICS,172,26-31. |
MLA | Lei, Hong[1],et al."Preparation of Ce-doped colloidal SiO2 composite abrasives and their chemical mechanical polishing behavior on sapphire substrates".MATERIALS CHEMISTRY AND PHYSICS 172(2016):26-31. |
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