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Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere 期刊论文
APPLIED SURFACE SCIENCE, 2016, 卷号: 388, 页码: 392-395
作者:  Pan, Zhangmin[1];  Yang, Yiming[2];  Huang, Jian[3];  Ren, Bing[4];  Yu, Hongze[5]
收藏  |  浏览/下载:7/0  |  提交时间:2019/04/26
Effect of RF power and substrate temperature on the properties of boron and gallium co-doped ZnO films 期刊论文
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING, 2016, 卷号: 53, 页码: 84-88
作者:  Yang, Jin[1];  Huang, Jian[2];  Ji, Huanhuan[3];  Tang, Ke[4];  Zhang, Lei[5]
收藏  |  浏览/下载:5/0  |  提交时间:2019/04/26


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