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	Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere
	Pan, Zhangmin[1]; Yang, Yiming[2]; Huang, Jian[3]; Ren, Bing[4]; Yu, Hongze[5]; Xu, Run[6]; Ji, Huanhuan[7]; Wang, Lin[8]; Wang, Linjun[9]
刊名	APPLIED SURFACE SCIENCE
	2016
卷号	388页码:392-395
关键词	Boron films Magnetron sputtering X-ray photoelectron spectroscopy
ISSN号	0169-4332
URL标识	查看原文
内容类型	期刊论文
URI标识	http://www.corc.org.cn/handle/1471x/2229922
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 2.[2]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 3.[3]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 4.[4]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 5.[5]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 6.[6]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 7.[7]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 8.[8]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China. 9.[9]Shanghai Univ, Sch Mat Sci & Engn, 333 Nanchen Rd, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Pan, Zhangmin[1],Yang, Yiming[2],Huang, Jian[3],et al. Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere[J]. APPLIED SURFACE SCIENCE,2016,388:392-395.
APA	Pan, Zhangmin[1].,Yang, Yiming[2].,Huang, Jian[3].,Ren, Bing[4].,Yu, Hongze[5].,...&Wang, Linjun[9].(2016).Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere.APPLIED SURFACE SCIENCE,388,392-395.
MLA	Pan, Zhangmin[1],et al."Study on the preparation of boron-rich film by magnetron sputtering in oxygen atmosphere".APPLIED SURFACE SCIENCE 388(2016):392-395.

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