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Topological optimization flexible micro clamp, has V type beam array connected with displacement amplifying part by displacement driving rod, and left and right driving fixed rods welded with left and right electrodes, respectively. 专利
申请日期: 2010-01-01, 公开日期: 2010-06-02
作者:  CHU J LIU S WANG W ZHANG C ZHANG R
收藏  |  浏览/下载:3/0  |  提交时间:2019/12/24
Electrothermal drive photoresist i.e. SU-8 rubber, micro gripper manufacturing method, involves embedding micro gripper electrode in SU-8 rubber, and forming radiator hole on gripper body of micro gripper. 专利
申请日期: 2010-01-01, 公开日期: 2010-06-30
作者:  CHU J WANG W ZHANG C ZHANG R
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/24
Electro-thermally driven micro-clamp producing method for microelectronic circuit, involves sputtering titanium or chromium and conductive metal at electrode position on upper surface of silicon sheet to complete production of micro-clamp. 专利
申请日期: 2010-01-01, 公开日期: 2010-04-21
作者:  CHU J LIU S WANG W ZHANG C ZHANG R
收藏  |  浏览/下载:4/0  |  提交时间:2019/12/24
Flexible electrothermic micro-clamp, has drive displacement rod whose upper parts are connected to lower parts of set of left and right rods through set of left and right flexible hinges. 专利
申请日期: 2010-01-01, 公开日期: 2010-10-13
作者:  ZHANG C ZHANG R WANG W CHU J CHEN Z
收藏  |  浏览/下载:1/0  |  提交时间:2019/12/24


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