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Dynamic compensation for the lithographic object lens 会议论文
Proceedings of SPIE: Optical System Alignment, Tolerancing, and Verification VIII, 2014
作者:  Zhu, Hongwei;  Xing, Tingwen;  Chen, Zexiang
收藏  |  浏览/下载:17/0  |  提交时间:2016/11/23
Testing the pyramid wavefront sensor without modulation used in the closed-loop adaptive optics system 会议论文
Proceedings of SPIE: Adaptive Optics Systems III, 2012
作者:  Wang, Shengqian;  Rao, Changhui;  Zhang, Ang;  Zhang, Xuejun;  Wei, Kai
收藏  |  浏览/下载:8/0  |  提交时间:2016/11/24
Characteristics of sensors based on MEMS grating with interdigitated comb structures 会议论文
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:  Naike Wei;  Weimin Wang;  Jun Yao;  Kefan Chen;  Jianhua Zhu
收藏  |  浏览/下载:17/0  |  提交时间:2016/11/25


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