QQ客服 官方微博 反馈留言

	Characteristics of sensors based on MEMS grating with interdigitated comb structures
	Naike Wei; Weimin Wang; Jun Yao; Kefan Chen; Jianhua Zhu; Fuhua Gao
	2010
会议名称	Proceedings of the SPIE - The International Society for Optical Engineering
会议日期	2010
卷号	7657
页码	76571O (6 pp.)
通讯作者	Naike Wei
中文摘要	Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.
英文摘要	Gratings as important spectral components have been employed in various optics applications, such as spectral analysis, filtering, dispersion compensation, sensing and so on. However, the physical structure of gratings produced by conventional technologies can not be alterable, this limits their applications under some specific requirements. Fortunately, MEMS technology breaks through that restriction, an interdigitated comb structure has been demonstrated in this paper. The comb structure has two sets of comb gratings; one is stationary and the other is movable in the horizontal plane. By driving the movable comb gratings, the intensity of diffraction will be adjustable. Under the condition of Fraunhofer approximation, the broadening extent of zero-order diffraction is monotonically increasing with the longitudinal displacement, and the relation between the intensity of first-order diffraction and the lateral displacement is a cosine squared function. A displacement sensor based on movable comb structures is presented and detailed analysis on sensitivity factors is given.
收录类别	EI ; ISTP
语种	英语
内容类型	会议论文
源URL	[http://ir.ioe.ac.cn/handle/181551/7878]
专题	光电技术研究所_微细加工光学技术国家重点实验室（开放室）
作者单位	中国科学院光电技术研究所
推荐引用方式 GB/T 7714	Naike Wei,Weimin Wang,Jun Yao,et al. Characteristics of sensors based on MEMS grating with interdigitated comb structures[C]. 见:Proceedings of the SPIE - The International Society for Optical Engineering. 2010.

个性服务

查看访问统计

相关权益政策

暂无数据

收藏/分享

除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。