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光电技术研究所 [20]
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期刊论文 [17]
会议论文 [3]
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2020 [3]
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Self-powered flexible pressure sensors based on nanopatterned polymer films
期刊论文
Sensor Review, 2020, 卷号: 40, 期号: 6, 页码: 1-6
作者:
Zhang, Man
;
Xia, Liangping
;
Dang, Suihu
;
Shi, Lifang
;
Cao, Axiu
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2021/05/11
A Novel Nanoimprint Lithography Thiol-ene Resist for Sub-70 nm Nanostructures
期刊论文
SCIENCE OF ADVANCED MATERIALS, 2020, 卷号: 12, 期号: 6, 页码: 779-783
作者:
Zhang, Man
;
Xia, Liang-Ping
;
Dang, Sui-Hu
;
Cao, A-Xiu
;
Deng, Qi-Ling
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2021/05/11
Thiol-ene Copolymers
Nanoimprint Lithography
Resist
Young's Modulus
Surface Energy
Intensity modulation based optical proximity optimization for the maskless lithography
期刊论文
OPTICS EXPRESS, 2020, 卷号: 28, 期号: 1, 页码: 548-557
作者:
Liu, Jianghui
;
Liu, Junbo
;
Deng, Qingyuan
;
Feng, Jinhua
;
Zhou, Shaolin
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2021/05/11
Fabrication of Vertical Organic Nanowire Arrays via Modified Nanoimprint Lithography
期刊论文
NANOSCIENCE AND NANOTECHNOLOGY LETTERS, 2019, 卷号: 11, 期号: 7, 页码: 1004-1007
作者:
Zhang, Man
;
Xia, Liangping
;
Dang, Suihu
;
Cao, Axiu
;
Shi, Lifang
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2021/05/06
Vertical Organic Nanowire Arrays
Modified Nanoimprint Lithography
Porous Anodic Alumina
High-Aspect-Ratio
Chemical Corrosion Solution
High precision processing CaF2 application research based on the magnetorheological finishing (MRF) technology
会议论文
作者:
Zhong, Xianyun
;
Fan, Bin
;
Wu, Fan
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2018/12/20
Calcium - Calcium alloys - Calcium fluoride - Finishing - Fluorine compounds - Fracture toughness - Magnetorheological fluids - Optical systems - Photolithography - Refractive index - Single crystals - Surface roughness - Thermal conductivity - Thermal expansion
Fabrication of high aspect ratio (> 100:1) nanopillar array based on thiol-ene
期刊论文
MICROELECTRONIC ENGINEERING, 2016, 卷号: 149, 页码: 52-56
作者:
Zhang, Man
;
Deng, Qiling
;
Shi, Lifang
;
Cao, Axiu
;
Pang, Hui
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2016/02/25
Nanopillar array
High aspect ratio
Thiol-ene
AAO template
Fabrication of hybrid soft-nanoimprint stamp with sub-100 nm resolution based on thiol-ene
期刊论文
Journal of Nanoscience and Nanotechnology, 2016, 卷号: 16, 期号: 12, 页码: 12316-12320
作者:
Zhang, Man
;
Deng, Qiling
;
Shi, Lifang
;
Pang, Hui
;
Cao, Axiu
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/06/14
Curing
Fabrication
Microchannels
Molds
Nanoimprint Lithography
Nanostructures
Pulse Width Modulation
Substrates
Synthesis (Chemical)
The Anomaly of Periodicity Doubling in Projection Photolithography of Periodic Features
期刊论文
IEEE Photonics Technology Letters, 2016, 卷号: 28, 期号: 22, 页码: 2529-2532
作者:
Liu, Junbo
;
Zhou, Shaolin
;
Yang, Yong
;
Hu, Song
;
He, Yu
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2018/06/14
Diffraction
Frequency Doublers
Light Polarization
Phase Shift
UV spectrum-integral Talbot lithography for amplitude periodic micro-grating fabrication
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850M
作者:
Deng, Qian
;
Liu, Junbo
;
Zhou, Shaolin
;
Tang, Yan
;
Zhao, Lixin
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/06/14
Crystal Symmetry
Frequency Doublers
Lithography
Manufacture
Microoptics
Optical Devices
Phase Shift
Ultraviolet Spectroscopy
Spectrum-Integral Talbot Effect for UV Photolithography With Extended DOF
期刊论文
IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 20, 页码: 2201-2204
作者:
Liu, Junbo
;
Zhou, Shaolin
;
Hu, Song
;
Gao, Hongtao
;
He, Yu
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2015/12/04
Diffraction
depth-of-focus
Talbot lithography
microfabrication
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