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CORC

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Full leaf-spring type spatial large-stroke parallel flexure micro-positioning stage and trajectory control 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2023, 卷号: 31, 期号: 18, 页码: 2675-2686
作者:  Y. Chen, L. Lai, P. Li and L. Zhu
收藏  |  浏览/下载：0/0  |  提交时间：2024/07/01
Closed-loop inverse iterative learning control in frequency-domain for electromagnetic driven compliant micro-positioning platform 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2021, 卷号: 29, 期号: 9, 页码: 2149-2157
作者:  X. Zhang;  L.-J. Lai;  P.-Z. Li and L.-M. Zhu
收藏  |  浏览/下载：6/0  |  提交时间：2022/06/13
Enhancing performance of FSM based on zero phase error tracking control 期刊论文
Journal of Jilin University(Engineering and Technology Edition), 2018, 卷号: 48, 期号: 3, 页码: 853-858
作者:  Zhang, Shi-Tao;  Zhang, Bao;  Li, Xian-Tao;  Wang, Zheng-Xi;  Tian, Da-Peng
收藏  |  浏览/下载：14/0  |  提交时间：2019/09/17
压电陶瓷两维偏摆镜驱动系统的设计 学位论文
硕士: 中国科学院大学, 2015
作者:  吴伊玲
收藏  |  浏览/下载：29/0  |  提交时间：2016/04/11
基于超精密定位的压电陶瓷驱动及其控制技术研究 学位论文
硕士: 中国科学院大学, 2015
作者:  江国栋
收藏  |  浏览/下载：64/0  |  提交时间：2016/04/11
Adaptive inverse control for tip/tilt mirror in adaptive optical system 期刊论文
Guangxue Jingmi Gongcheng/Optics and Precision Engineering, 2015, 卷号: 23, 期号: 8, 页码: 2203-2210
作者:  Wang, Y.-K.;  L.-F. Hu;  C.-C. Wang;  S.-X. Wang and L. Xuan
收藏  |  浏览/下载：13/0  |  提交时间：2016/08/24
The research of control strategy on AOD furnace tilting system (EI CONFERENCE) 会议论文
2010 International Conference on Logistics Systems and Intelligent Management, ICLSIM 2010, January 9, 2010 - January 10, 2010, Harbin, China
Ma H. T.; You W.; Chen T.
收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25
Key techniques of laser direct writing of fine lines on the spherical surface (EI CONFERENCE) 会议论文
ICO20: Optical Design and Fabrication, August 21, 2005 - August 26, 2005, Changchun, China
Liang F.; Hu J.
收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25
The main principles of laser direct writing (LDW) system for lines on the spherical surface (SS) are discussed. It is pointed out that line profile is determined by the exposure dose distribution  which lies on the light intensity distribution of focus plane and the scanning speed. To improve the quality of line profile on the SS  several key techniques as follows are introduced. Firstly  the unique system configuration  four axes mutually intersecting at the center of the SS  is adopted  which ensures the shape of the focus be maintained circular during the writing period. Secondly  an automatic focus system (AFS) with the function of automatic focus in a certain range is introduced. Thirdly  to guarantee the linear velocity to accord with the exposure character of the photoresist all the time  an efficient arithmetic that controls motors run at appropriate angular velocity in different latitude is developed. Finally  to achieve a stable and well-behaved system so as to compensate the velocity instability resulting from unavoidable errors of mechanical and electronics factor  a powerful programmable multi-axis controller (PMAC) is utilized as the kernel element of the servocontrol system  and the curves of step response and parabolic response achieved by feedforward and PID loop tuning indicate that the location precision and velocity stability have reached a high level. The experimental results of LDW of lines on the SS work piece with a diameter 30 mm and a radius equal to 100 mm are given. The section analysis of the lines on the photoresist by the atomic force microscope (AFM) after exposure and development is performed. The results show that line width is about 3.0 m  and the steep sides of the lines are parallel to each other.  

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