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科研机构
光电技术研究所 [21]
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期刊论文 [21]
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2016 [17]
2015 [3]
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内容类型:期刊论文
专题:光电技术研究所
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The advancement of the high precision stress polishing
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2016, 卷号: 9683, 页码: 96831F
作者:
Li, Chaoqiang
;
Lei, Baiping
;
Han, Yu
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2018/06/14
Aspherics
Error Analysis
Manufacture
Mechanical Actuators
Mirrors
Polishing
Design and simulation of large field plate lithography lens
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V
作者:
Deng, Chao
;
Xing, Tingwen
;
Lin, Wumei
;
Zhu, Xianchang
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2018/06/14
Fits And Tolerances
Lithography
Manufacture
Materials Testing
Optical Design
Optical Devices
Optical Systems
Diffractive element design for generating multi-channel structured light field
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850P
作者:
Wang, Jia-Zhou
;
Pang, Hui
;
Zhang, Man
;
Shi, Li-Fang
;
Cao, A-Xiu
收藏
  |  
浏览/下载:14/0
  |  
提交时间:2018/06/14
Design
Diffraction
Diffractive Optical Elements
Manufacture
Materials Testing
Optical Devices
Performance analysis of adaptive fiber laser array propagating in atmosphere with correction of high order aberrations in sub-Aperture
期刊论文
Proceedings of SPIE: Advanced Optical Design and Manufacturing Technology and Astronomical Telescopes and Instrumentation, 2016, 卷号: 10154, 页码: 1015414
作者:
Li, Feng
;
Geng, Chao
;
Li, Xinyang
;
Qiu, Qi
收藏
  |  
浏览/下载:59/0
  |  
提交时间:2018/06/14
Cost Functions
Engines
Fiber Lasers
Fibers
Laser Applications
Laser Beams
Manufacture
Optical Design
Optical Phase Conjugation
Pistons
Radio Telescopes
Telescopes
Turbulence
Optimization design for the supporting system of 5m collimator primary mirror
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2016, 卷号: 9683, 页码: 968321
作者:
Guan, Shaohua
;
Ma, Tianmeng
;
Zhang, Ming
收藏
  |  
浏览/下载:56/0
  |  
提交时间:2018/06/14
Deformation
Finite Element Method
Manufacture
Mirrors
Analysis of offset error for segmented micro-structure optical element based on optical diffraction theory
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2016, 卷号: 9682, 页码: 968210
作者:
Su, Jinyan
;
Wu, Shibin
;
Yang, Wei
;
Wang, Lihua
收藏
  |  
浏览/下载:50/0
  |  
提交时间:2018/06/14
Diffraction
Errors
Functions
Image Quality
Lenses
Manufacture
Microstructure
Mirrors
Optical Instrument Lenses
Optical Systems
Optical Testing
Telescopes
A new flexible hybrid mask for contact exposure and its fabrication
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850Q
作者:
Liu, Xin
;
Zhang, Man
;
Cao, A-Xiu
;
Pang, Hui
;
Wang, Jia-Zhou
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2018/06/14
Elastic Moduli
Fabrication
Lithography
Manufacture
Nanostructures
Optical Devices
Photolithography
Photoresists
Polymers
Printing
Topography measurement of micro structure by modulation-based method
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968505
作者:
Zhou, Yi
;
Tang, Yan
;
Liu, Junbo
;
Deng, Qinyuan
;
Cheng, Yiguang
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/06/14
Interferometry
Light Sources
Manufacture
Materials Testing
Microstructure
Optical Devices
Pixels
Surface Measurement
Topography
Positioning control system of three-dimensional wafer stage of lithography
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850T
作者:
Tian, Peng
;
Yan, Wei
;
Yang, Fan
;
Li, Fanxing
;
Hu, Song
收藏
  |  
浏览/下载:22/0
  |  
提交时间:2018/06/14
Closed Loop Systems
Control Systems
Lithography
Manufacture
Materials Testing
Optical Devices
Pulse Width Modulation
Stepping Motors
Thickness measurement of transparent film by white-light interferometry
期刊论文
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 968506
作者:
Deng, Qinyuan
;
Zhou, Yi
;
Liu, Junbo
;
Yao, Jingwei
;
Hu, Song
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2018/06/14
Film Thickness
Manufacture
Materials Testing
Optical Devices
Optical Films
Reflection
Reflectometers
Structural Design
Thickness Gages
Thickness Measurement
Thin Films
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