Thickness measurement of transparent film by white-light interferometry

doi:10.1117/12.2243601

CORC > 光电技术研究所 > 中国科学院光电技术研究所 > 微电子装备总体研究室（四室）

	Thickness measurement of transparent film by white-light interferometry
	Deng, Qinyuan 1,2; Zhou, Yi 1,2; Liu, Junbo 1; Yao, Jingwei 1,2; Hu, Song 1
刊名	Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials
	2016
卷号	9685 页码:968506
关键词	Film Thickness Manufacture Materials Testing Optical Devices Optical Films Reflection Reflectometers Structural Design Thickness Gages Thickness Measurement Thin Films
ISSN号	0277-786X
DOI	10.1117/12.2243601
文献子类	C
英文摘要	White-light scanning interferometry plays an important role in precise profile metrology of microstructure. However, applying this approach may also be limited because of the optical reflection behavior of the surface. While there is a thin film on the surface, the reflection behavior of top and bottom of the thin-film will cause severer phase errors. Recently, the method by combining both reflectometry and white-light scanning interferometry is proposed to measure the film thickness and surface profile. This article firstly explains the principle of the proposed method and then verifies the feasibility of the thickness-measurement method for transparent film on a Silicon surface. Both of the algorithm and the experiment system have been optimized to measure the film thickness with high precision. © 2016 SPIE.
语种	英语
WOS记录号	WOS:000387429600006
资助机构	Chinese Academy of Sciences, Institute of Optics and Electronics (IOE) ; The Chinese Optical Society (COS)
内容类型	期刊论文
源URL	[http://ir.ioe.ac.cn/handle/181551/8505]
专题	光电技术研究所_微电子装备总体研究室（四室）
作者单位	1.State Key Laboratory of Optical Technologies for Microfabrication, Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu 2.610209, China 3.University of Chinese Academy of Sciences, Beijing 4.100049, China
推荐引用方式 GB/T 7714	Deng, Qinyuan,Zhou, Yi,Liu, Junbo,et al. Thickness measurement of transparent film by white-light interferometry[J]. Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,2016,9685:968506.
APA	Deng, Qinyuan,Zhou, Yi,Liu, Junbo,Yao, Jingwei,&Hu, Song.(2016).Thickness measurement of transparent film by white-light interferometry.Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials,9685,968506.
MLA	Deng, Qinyuan,et al."Thickness measurement of transparent film by white-light interferometry".Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials 9685(2016):968506.