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CORC

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MEMS scanning mirror with vertical comb actuator based on latching technique 其他
2013-01-01
Chen, Qing Hua; Li, Yan Mei; Chen, Ying Jun; Wu, Wen Gang
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/17
A silicon-on-glass Z-axis accelerometer with vertical sensing comb capacitors 其他
2012-01-01
Wang, Jiankun; Yang, Zhenchuan; Yan, Guizhen
收藏  |  浏览/下载：2/0  |  提交时间：2015/11/10
Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors 其他
2006-01-01
Liu, Xuesong; Yang, Zhengchuan; Yan, Guizhen; Fan, Jie; Ding, Haitao; Liu, Ye
收藏  |  浏览/下载：7/0  |  提交时间：2015/11/16
Hybrid electrostatic actuator for micromirror tilting 其他
2005-01-01
Wu, WG; Chen, QH; Yan, GZ; Hao, YL; Yin, DQ; Chen, ZY; Xu, AS
收藏  |  浏览/下载：4/0  |  提交时间：2015/11/13
A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors 其他
2005-01-01
Yang, ZC; Wang, CS; Yan, GZ; Hao, YL; Wu, GY
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
A bulk micromachined lateral axis gyroscope with vertical sensing comb capacitors 其他
2005-01-01
Yang, Zhenchuan; Wang, Congshun; Yan, Guizhen; Hao, Yilong; Wu, Guoying
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Hybrid electrostatic actuator for micromirror tilting 其他
2005-01-01
Wu, W.G.; Chen, Q.H.; Yan, G.Z.; Hao, Y.L.; Yin, D.Q.; Chen, Z.Y.; Xu, A.S.
收藏  |  浏览/下载：6/0  |  提交时间：2015/11/13
Torsion-mirror actuators with compound electrostatic driving structures 其他
2004-01-01
Wu, WG; Chen, QH; Han, X; Yan, GZ; Hao, YL
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Vertical profiles and CD loss control in deep RIE technology 其他
2004-01-01
Liu, XS; Wang, CW; Zhu, Y; Yan, GZ
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13
Torsion-mirror actuators with compound electrostatic driving structures 其他
2004-01-01
Wu, Wengang; Chen, Qinghua; Han, Xiang; Yan, Guizhen; Hao, Yilong
收藏  |  浏览/下载：3/0  |  提交时间：2015/11/13

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