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	Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors
	Liu, Xuesong ; Yang, Zhengchuan ; Yan, Guizhen ; Fan, Jie ; Ding, Haitao ; Liu, Ye
	2006
关键词	gyroscope vertical comb bulk micromachined doubly decoupled out-of-plane movement
英文摘要	A novel comb capacitor, the fixed and movable fingers of which have different positions but the same height, is proposed. The comb capacitor can be used to measure out-of-plane movement through differential method and has low air damping. Using this kind of comb capacitor, a bulk micromachined y-axis gyroscope is designed, whose structure is doubly decoupled. The gyroscope is fabricated by silicon/glass wafer bonding and deep reactive ion etching process, in which composite etching mask technique is used twice to realize the novel comb structure. The process is compatible with previous reported fabrication process of lateral accelerometers and z-axis gyroscopes.; http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000248485801056&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701 ; Engineering, Electrical & Electronic; Nanoscience & Nanotechnology; EI; CPCI-S(ISTP); 1
语种	英语
DOI标识	10.1109/NEMS.2006.334890
内容类型	其他
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/406570]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Liu, Xuesong,Yang, Zhengchuan,Yan, Guizhen,et al. Design and fabrication of a lateral axis gyroscope with asymmetric comb-fingers as sensing capacitors. 2006-01-01.

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