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| Improved etching uniformity using equivalent electrodes on an unconventional, irregular membrane optical element for large aperture diffractive optical telescopes 会议论文
作者: Zhang, Jingwen; Li, Zhiwei; Shao, Junming; Liu, Dun; Fan, Bin
  收藏 | 浏览/下载：2/0 | 提交时间：2020/12/18
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| Gas flow simulation research on reaction chamber of reactive ion etching 会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者: Zhang, Jingwen; Bin, Fan; Li, Zhiwei; Liu, Xin; Li, Bincheng
收藏 | 浏览/下载：18/0 | 提交时间：2021/05/06 |
| Gas flow simulation research on reaction chamber of reactive ion etching 会议论文
Chengdu, China, June 26, 2018 - June 29, 2018
作者: Zhang, Jingwen; Bin, Fan; Li, Zhiwei; Liu, Xin; Li, Bincheng
收藏 | 浏览/下载：25/0 | 提交时间：2020/11/15
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| A stretchable transparent conductive film based on polymer microspheres lithography technology 会议论文
上海, 2018
作者: Xinyu Zhang; Yougen Hu; Wenlong Jiang; Pengli Zhu; Rong Sun
收藏 | 浏览/下载：27/0 | 提交时间：2019/01/31 |
| Effect of ion bombardment time on the profile of atomic layer etching 会议论文
2nd Asia-Pacific Conference on Plasma Physics
作者: Dai ZL(戴忠玲); Dong W(董婉); Song YH(宋远红); Wang YN(王友年)
收藏 | 浏览/下载：12/0 | 提交时间：2019/12/02 |
| Effect of plasma uniformity on etching profiles 会议论文
The 71st Annual Gaseous Electronics Conference
作者: Dong W(董婉); Wang XF(王喜凤); Song YH(宋远红); Dai ZL(戴忠玲); Wang YN(王友年)
收藏 | 浏览/下载：6/0 | 提交时间：2019/12/02 |
| Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching 会议论文
Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018
作者: Zhang Jingwen; Fan Bin; Li Zhiwei; Liu Xin; Li Bincheng
收藏 | 浏览/下载：27/0 | 提交时间：2019/08/23
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| Gas Flow Simulation Research on Reaction Chamber of Reactive ion etching 会议论文
作者: Zhang Jingwen; Fan Bin; Li Zhiwei; Liu Xin; Li Bincheng
收藏 | 浏览/下载：12/0 | 提交时间：2019/11/15
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| Improvement of the GaN/AlGaN HEMTs Performance with BCl3/Cl2/Ar-Based Inductively Coupled Plasma Etching 会议论文
作者: Wei K(魏珂); Zheng YK(郑英奎)
收藏 | 浏览/下载：9/0 | 提交时间：2018/07/20 |
| A Study on Inductively Coupled Plasma Etch Rate of HgCdTe at Cryogenic Temperature 会议论文
作者: Liu FL; Chen YY; Ye ZH; Ding RJ; He L
收藏 | 浏览/下载：15/0 | 提交时间：2018/11/20 |
