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Design of a zoom projection optical system for high resolution projector 会议论文
Beijing, China, 2020-11-30
作者:  Qin, Guang;  Fan, Xuewu;  Ma, Zixuan;  Zhang, Gengyao
收藏  |  浏览/下载：13/0  |  提交时间：2020/12/29
Construction of Microenvironment Structures for the Study of Cell Behavior using DMD-based Optical Projection Lithography 会议论文
Tyndall Natl Inst, Cork, IRELAND, July 23-26, 2018
作者:  Ge ZX(葛治星);  Yu HB(于海波);  Yang WG(杨文广);  Liu LQ(刘连庆)
收藏  |  浏览/下载：18/0  |  提交时间：2019/03/09
Design of UV LED illumination system for direct imaging lithography 会议论文
Beijing, China, October 11, 2018 - October 13, 2018
作者:  Jiang, Haibo;  Sun, Xiuhui;  Yang, Ruofu;  Chen, Jianjun;  Xie, Lin
收藏  |  浏览/下载：33/0  |  提交时间：2019/06/25
An Electrostatic Vertical Comb-Drive Micromirror with Self-aligned Assembly 会议论文
2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS), 2017-01-01
作者:  Fan, Yanjun[1];  Cui, Can[2];  Yu, Huijun[3];  Shen, Wenjiang[4];  Wang, Zhi[5]
收藏  |  浏览/下载：5/0  |  提交时间：2019/04/24
LCLS Injector Laser Profile Shaping Using Digital Micromirror Device 会议论文
USA, 2016
作者:  S.Li
收藏  |  浏览/下载：15/0  |  提交时间：2017/11/03
Design of MEMS-based micro-filter integrating grating and tunable Fabry-Perot cavity 会议论文
International Journal of Nanotechnology, 2015
作者:  Shi, Zhendong;  Fang, Liang;  Zhou, Chongxi
收藏  |  浏览/下载：20/0  |  提交时间：2016/11/25
An Electromagnetically-driven MEMS Micromirror for Laser Projection 会议论文
IEEE 10th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 2015-01-01
作者:  Chen, Muyu[1];  Yu, Huijun[2];  Guo, Shuai[3];  Xu, Run[4];  Shen, Wenjiang[5]
收藏  |  浏览/下载：7/0  |  提交时间：2019/04/26
Twisting sliding mode control of an electrostatic MEMS micromirror for a laser scanning system 会议论文
第三十四届中国控制会议, 2015-07-01
作者:  Chen Hui[1];  Sun ZhenDong[2];  Sun WeiJie[3];  Yeow, John T. W.[4]
收藏  |  浏览/下载：3/0  |  提交时间：2019/12/23
Twisting sliding mode control of an electrostatic MEMS micromirror for a laser scanning system 会议论文
34th Chinese Control Conference (CCC), 2015-01-01
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收藏  |  浏览/下载：1/0  |  提交时间：2019/12/23
Illumination system without scanning slit for lithographic tools 会议论文
27th optical microlithography conference as part of the spie advanced lithography symposium
作者:  Zhang, Yunbo;  Zeng, Aijun;  Wang, Ying;  Chen, Mingxing;  Zhang, Shanhua
收藏  |  浏览/下载：23/0  |  提交时间：2016/11/28

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