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	An Electrostatic Vertical Comb-Drive Micromirror with Self-aligned Assembly
	Fan, Yanjun[1]; Cui, Can[2]; Yu, Huijun[3]; Shen, Wenjiang[4]; Wang, Zhi[5]; Li, Jun[6]
	2017
会议名称	2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS)
会议日期	2017-01-01
关键词	MEMS vertical comb drive self-aligned
页码	268-272
URL标识	查看原文
内容类型	会议论文
URI标识	http://www.corc.org.cn/handle/1471x/2182429
专题	上海大学
作者单位	1.[1]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China. 2.Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Beijing 215123, Peoples R China. 3.[2]Beijing Jiaotong Univ, Key Lab Educ Minist Luminescence & Opt Technol, Beijing 100044, Peoples R China. 4.Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Beijing 215123, Peoples R China. 5.[3]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Beijing 215123, Peoples R China. 6.[4]Chinese Acad Sci, Suzhou Inst Nanotech & Nanobion, Key Lab Nanodevices & Applicat, Beijing 215123, Peoples R China. 7.[5]Beijing Jiaotong Univ, Key Lab Educ Minist Luminescence & Opt Technol, Beijing 100044, Peoples R China. 8.[6]Shanghai Univ, Sch Mat Sci & Engn, Shanghai 200444, Peoples R China.
推荐引用方式 GB/T 7714	Fan, Yanjun[1],Cui, Can[2],Yu, Huijun[3],et al. An Electrostatic Vertical Comb-Drive Micromirror with Self-aligned Assembly[C]. 见:2017 IEEE 12TH INTERNATIONAL CONFERENCE ON NANO/MICRO ENGINEERED AND MOLECULAR SYSTEMS (NEMS). 2017-01-01.

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