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长春光学精密机械与物... [1]
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会议论文 [1]
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2008 [1]
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内容类型:会议论文
专题:长春光学精密机械与物理研究所
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Annular sub-aperture stitching interferometry for testing of large asphreical surfaces (EI CONFERENCE)
会议论文
International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China
Wang X.-K.
;
Wang L.-H.
;
Zheng L.-G.
;
Deng W.-J.
;
Zhang X.-J.
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提交时间:2013/03/25
Annular subaperture stitching interferometric technology can test large-aperture
and the PV and RMS of residual error of the full aperture phase distribution is 0.027 and 0.0023
high numerical aperture aspheric surfaces with high resolution
the relative error of PV and RMS is -0.53% and -0.31%
respectively. The results conclude that this splicing model and algorithm are accurate and feasible. So it provides another quantitive measurement for test aspheric surfaces especially for large aperture aspheres besides null-compensation.
low cost and high efficiency without auxiliary null optics. In this paper
the basic principle and theory of the stitching method are introduced
the reasonable mathematical model and effective splicing algorithm are established based on simultaneous least-squares method and Zernike polynomial fitting. The translation errors are eliminated from each subaperture through the synthetical optimization stitching mode
it keeps the error from transmitting and accumulating. The numerical simulations have been carried on by this method. As results
the surface map of the full aperture after stitching is consistent to the input surface map
the difference of PV error and RMS error between them is -0.0074 and -0.00052 ( is 632.8nm)
respectively
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