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Rotating compensator sampling for spectroscopic imaging ellipsometry 会议论文
5th International Conference on Spectroscopic Ellipsometry, Albany, NY, MAY 23-29, 2010
作者:  Meng YH(孟永宏);  Jin G(靳刚)
收藏  |  浏览/下载:17/0  |  提交时间:2012/04/01
An automatic imaging spectroscopic ellipsometer for characterization of nano-film pattern on solid substrate 会议论文
4th International Conference on Spectroscopic Ellipsometry (ICSE-4), Stockholm, SWEDEN, JUN 11-15, 2007
作者:  Meng YH(孟永宏);  Chen YY(陈艳艳);  Qi C(齐财);  Liu L(刘丽);  Jin G(靳刚)
收藏  |  浏览/下载:1153/91  |  提交时间:2009/07/23


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