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ZnO-based film bulk acoustic resonator for high sensitivity biosensor applications 期刊论文
APPLIED PHYSICS LETTERS, 2007, 卷号: 90, 期号: 14, 页码: 143503-143503
Yan, Z; Zhou, XY; Pang, GKH; Zhang, T; Liu, WL; Cheng, JG; Song, ZT; Feng, SL; Lai, LH; Chen, JZ; Wang, Y
收藏  |  浏览/下载:13/0  |  提交时间:2012/03/24
Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus 期刊论文
APPLIED PHYSICS LETTERS, 2003, 卷号: 83, 期号: 15, 页码: 3081-3083
Li, XX; Ono, T; Wang, YL; Esashi, M
收藏  |  浏览/下载:9/0  |  提交时间:2011/12/17


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