Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus

	Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus
	Li, XX ; Ono, T ; Wang, YL ; Esashi, M
刊名	APPLIED PHYSICS LETTERS
	2003
卷号	83 期号:15 页码:3081-3083
关键词	SENSITIVITY OSCILLATORS
ISSN号	0003-6951
通讯作者	Li, XX, Chinese Acad Sci, Shanghai Inst Microsyst & Informat Technol, State Key Lab Transducer Technol, 865 Changning Rd, Shanghai 200050, Peoples R China
学科主题	Physics, Applied
收录类别	SCI
语种	英语
公开日期	2011-12-17
内容类型	期刊论文
源URL	[http://ir.sim.ac.cn/handle/331004/38749]
专题	上海微系统与信息技术研究所_微系统技术_期刊论文
推荐引用方式 GB/T 7714	Li, XX,Ono, T,Wang, YL,et al. Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus[J]. APPLIED PHYSICS LETTERS,2003,83(15):3081-3083.
APA	Li, XX,Ono, T,Wang, YL,&Esashi, M.(2003).Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus.APPLIED PHYSICS LETTERS,83(15),3081-3083.
MLA	Li, XX,et al."Ultrathin single-crystalline-silicon cantilever resonators: Fabrication technology and significant specimen size effect on Young's modulus".APPLIED PHYSICS LETTERS 83.15(2003):3081-3083.