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浏览/检索结果: 共16条，第1-10条 帮助 限定条件 学科主题：Optics    专题：上海微系统与信息技术研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Layout optimization for thick-film resist overlay metrology - art. no. 682726 期刊论文 QUANTUM OPTICS, OPTICAL DATA STORAGE, AND ADVANCED MICROLITHOGRAPHY, 2008, 卷号: 6827, 页码: 82726-82726 Zhu, L; Li, J; Zhou, B; Gu, YL; Yang, S 收藏  |  浏览/下载：12/0  |  提交时间：2012/03/24 High-speed and large-scale electromagnetically actuated MEMS scanning-mirror - art. no. 683609 期刊论文 MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 卷号: 6836, 页码: 83609-83609 Mu, CJ; Zhang, FL; Wu, YM 收藏  |  浏览/下载：8/0  |  提交时间：2011/12/17 Experimental study on roughness and flatness of micromirror fabricated by different anisotropic silicon etching processes - art. no. 683605 期刊论文 MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 卷号: 6836, 页码: 83605-83605 Xu, J; Huang, ZX; Xu, XX; Wu, YM 收藏  |  浏览/下载：7/0  |  提交时间：2011/12/17 SURFACE   Rapid and simple half-quantitative measurement alpha-fetoprotein by poly(dimethylsiloxane) microfluidic chip immunochromatographic assay - art. no. 68360B 期刊论文 MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 卷号: 6836, 页码: B8360-B8360 Tong, C; Jin, QH; Zhao, JL 收藏  |  浏览/下载：27/0  |  提交时间：2011/12/17 LIQUID-CHROMATOGRAPHY  ELECTROPHORESIS  SYSTEM   Optical MEMS devices based on micromachined torsion structure - art. no. 683606 期刊论文 MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 卷号: 6836, 页码: 83606-83606 Wu, YM; Xu, J; Li, SH; Wan, ZJ; Mu, CJ 收藏  |  浏览/下载：17/0  |  提交时间：2011/12/17 ATTENUATOR   Energy efficient collaborative target tracking by Gaussian Rao-Blackwellised particle filter in wireless sensor networks - art. no. 69710K 期刊论文 ACQUISITION, TRACKING, POINTING, AND LASER SYSTEMS TECHNOLOGIES XXII, 2008, 卷号: 6971, 页码: K9710-K9710 Yu, ZJ; Wei, JM; Liu, HT 收藏  |  浏览/下载：10/0  |  提交时间：2011/11/09 MODELS   Optical fiber accelerometer based on MEMS torsional micromirror - art. no. 68360Q 期刊论文 MEMS/MOEMS TECHNOLOGIES AND APPLICATIONS III, 2008, 卷号: 6836, 页码: Q8360-Q8360 Zeng, FL; Zhong, SL; Xu, J; Wu, YM 收藏  |  浏览/下载：14/0  |  提交时间：2011/12/17 SENSORS   Slope-integrated methodology for OPC model calibration - art. no. 682725 期刊论文 QUANTUM OPTICS, OPTICAL DATA STORAGE, AND ADVANCED MICROLITHOGRAPHY, 2008, 卷号: 6827, 页码: 82725-82725 Zhu, L; Lu, M; King, D; Gu, YL; Yang, S 收藏  |  浏览/下载：8/0  |  提交时间：2012/03/24 A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306 期刊论文 INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3, 2007, 卷号: 6423, 页码: 42306-42306 Fan,KB; Xiong,B; Che,LF; Wang,YL 收藏  |  浏览/下载：9/0  |  提交时间：2011/12/17 FABRICATION  SENSORS   A novel hinged micromachined high-g piezoresistive accelerometer - art. no. 642306 期刊论文 INTERNATIONAL CONFERENCE ON SMART MATERIALS AND NANOTECHNOLOGY IN ENGINEERING, PTS 1-3, 2007, 卷号: 6423, 页码: 42306-42306 Fan, KB; Xiong, B; Che, LF; Wang, YL 收藏  |  浏览/下载：16/0  |  提交时间：2011/12/17 FABRICATION  SENSORS