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Argon ion beam assisted magnetron sputtering deposition of boron-doped a-Si:H thin films with improved conductivity 期刊论文
J. Non-Cryst. Solids, 2013, 期号: 1, 页码: 177—180
Jianmin Chen; Linqing Wang a,d, Weiyan Wang b, Junjun Huang b, Yuheng Zeng b, Ruiqin Tan c, Weijie Song b, Jianmin Chen a,⁎
收藏  |  浏览/下载:31/0  |  提交时间:2013/12/16
Electrical properties of boron- and phosphorous-doped microcrystalline silicon thin films prepared by magnetron sputtering of heavily doped silicon targets 期刊论文
Journal of Materials Science: Materials in Electronics, 2013, 卷号: 1946, 期号: 6, 页码: 2122—2127
Wang WY(王维燕); Weiyan Wang • Jinhua Huang • Wei Xu • Junjun Huang • Yuheng Zeng • Weijie Song
收藏  |  浏览/下载:17/0  |  提交时间:2013/12/16
Effects of substrate temperature on structural and electrical properties of SiO2-matrix boron-doped silicon nanocrystal thin films 期刊论文
Applied Surface Science, 2013, 期号: 1, 页码: 428—431
Song WJ(宋伟杰); Junjun Huanga, Yuheng Zenga, Ruiqin Tanb, Weiyan Wanga, Ye Yanga, Ning Daia, Weijie Songa,∗
收藏  |  浏览/下载:13/0  |  提交时间:2013/12/16


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