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FORMATION OF TISI2 AND SHALLOW JUNCTION BY AS+ ION-BEAM MIXING AND INFRARED RAPID HEAT-TREATMENT 期刊论文
ieee transactions on electron devices, 1989, 卷号: 36, 期号: 3, 页码: 514-521
MIN Y; LIN HW; TSIEN PH; ZHANG JP; YIN SD
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