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Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive-ion Etching 期刊论文
SENSORS AND MATERIALS, 2018, 卷号: 30, 页码: 2747-2760
作者:  Yan, Haixia;  Bao, Jinyan;  Yu, Quan;  Dong, Linxi
收藏  |  浏览/下载:13/0  |  提交时间:2019/11/26
Manufacturing of a Compact Micro Air Bearing Device for Power Micro Electro Mechanical System (MEMS) Applications Using Silica Film Assisted Processing 期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:  Yu, Mingxing;  Lv, Pin;  Xu, Tiantong;  Tan, Xiao;  Li, Haiwang
收藏  |  浏览/下载:6/0  |  提交时间:2019/12/30


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