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Novel deformable mirror based on silicon micromachining technology 期刊论文
qiangjiguang yu lizishuhigh power laser and particle beams, 2004
Yu, Hong-Bin; Chen, Hai-Qing; Zhang, Da-Cheng; Zhu, Zi-Min; Li, Ting
收藏  |  浏览/下载:5/0  |  提交时间:2015/11/16
Novel deformable mirror based on MEMS technology 期刊论文
pan tao ti hsueh paochinese journal of semiconductors, 2004
Yu, Hongbin; Chen, Haiqing; Zhu, Zimin; Zhang, Dacheng; Li, Ting
收藏  |  浏览/下载:2/0  |  提交时间:2015/11/16


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