Novel deformable mirror based on silicon micromachining technology

CORC > 北京大学 > 信息科学技术学院

	Novel deformable mirror based on silicon micromachining technology
	Yu, Hong-Bin ; Chen, Hai-Qing ; Zhang, Da-Cheng ; Zhu, Zi-Min ; Li, Ting
刊名	qiangjiguang yu lizishuhigh power laser and particle beams
	2004
英文摘要	Based on silicon micromachining technology, a novel deformable mirror with 30 mm ?? 30 mm effective reflecting surface and 49 actuators is designed and fabricated. It is composed of a silicon membrane, at the back of which is attached by a 7??7 pillars array. The pillars and bonding part are fabricated through two etching steps with different depth. In terms of optimization, a strip pattern is designed specially for the convex corner compensation during the etching process, and the anodic bonding process is performed under 0.2 MPa atmospheric pressures.; EI; 0; 7; 825-829; 16
语种	英语
内容类型	期刊论文
源URL	[http://ir.pku.edu.cn/handle/20.500.11897/407438]
专题	信息科学技术学院
推荐引用方式 GB/T 7714	Yu, Hong-Bin,Chen, Hai-Qing,Zhang, Da-Cheng,et al. Novel deformable mirror based on silicon micromachining technology[J]. qiangjiguang yu lizishuhigh power laser and particle beams,2004.
APA	Yu, Hong-Bin,Chen, Hai-Qing,Zhang, Da-Cheng,Zhu, Zi-Min,&Li, Ting.(2004).Novel deformable mirror based on silicon micromachining technology.qiangjiguang yu lizishuhigh power laser and particle beams.
MLA	Yu, Hong-Bin,et al."Novel deformable mirror based on silicon micromachining technology".qiangjiguang yu lizishuhigh power laser and particle beams (2004).