A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation | |
Houfu Dai; Fa Zhang; Jianbin Chen | |
刊名 | International Journal of Mechanical Sciences |
2019 | |
卷号 | Vol.157-158页码:254-266 |
关键词 | Molecular dynamics Laser nano-structured diamond abrasive Mechanical polishing Subsurface damage |
ISSN号 | 0020-7403 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4618300 |
专题 | 湖南大学 |
作者单位 | 1.b State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 410082, China a College of Mechanical Engineering, Guizhou University, Guiyang 550025, China 2.School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China |
推荐引用方式 GB/T 7714 | Houfu Dai,Fa Zhang,Jianbin Chen. A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation[J]. International Journal of Mechanical Sciences,2019,Vol.157-158:254-266. |
APA | Houfu Dai,Fa Zhang,&Jianbin Chen.(2019).A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation.International Journal of Mechanical Sciences,Vol.157-158,254-266. |
MLA | Houfu Dai,et al."A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation".International Journal of Mechanical Sciences Vol.157-158(2019):254-266. |
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