A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation | |
Dai, Houfu; Zhang, Fa; Chen, Jianbin | |
刊名 | International Journal of Mechanical Sciences |
2019 | |
卷号 | Vol.157-158页码:254-266 |
URL标识 | 查看原文 |
公开日期 | [db:dc_date_available] |
内容类型 | 期刊论文 |
URI标识 | http://www.corc.org.cn/handle/1471x/4614562 |
专题 | 湖南大学 |
作者单位 | 1.) College of Mechanical Engineering, Guizhou University, Guiyang 2.550025, China 3.State Key Laboratory of Advanced Design and Manufacturing for Vehicle Body, Hunan University, Changsha 4.410082, China 5.School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 6.315211, China |
推荐引用方式 GB/T 7714 | Dai, Houfu,Zhang, Fa,Chen, Jianbin. A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation[J]. International Journal of Mechanical Sciences,2019,Vol.157-158:254-266. |
APA | Dai, Houfu,Zhang, Fa,&Chen, Jianbin.(2019).A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation.International Journal of Mechanical Sciences,Vol.157-158,254-266. |
MLA | Dai, Houfu,et al."A study of ultraprecision mechanical polishing of single-crystal silicon with laser nano-structured diamond abrasive by molecular dynamics simulation".International Journal of Mechanical Sciences Vol.157-158(2019):254-266. |
个性服务 |
查看访问统计 |
相关权益政策 |
暂无数据 |
收藏/分享 |
除非特别说明,本系统中所有内容都受版权保护,并保留所有权利。
修改评论