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浏览/检索结果: 共1条，第1-1条 帮助 限定条件 专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 A composite hardness stamp in 184 PDMS for nanostructures transfer in high fidelity (EI CONFERENCE) 会议论文 2012 12th IEEE International Conference on Nanotechnology, NANO 2012, August 20, 2012 - August 23, 2012, Birmingham, United kingdom Li S.; Shi L.; Yang Z.; Huang X.; Zhang Z.; Gao F.; Guo Y.; Yu W.; Du J. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 To improve the fidelity of nanostructures in transfer process  a composite stamp with reasonable hardness distribution in 184 PDMS used to nanoimprint was studied. The stamp is composed of a stiff 184 PDMS structured layer and a soft 184 PDMS supporter layer. We studied the relationship between the hardness of the 184 PDMS and the proportion of each component in 184 PDMS. The appropriate components proportions of prepolymer and curing agent corresponding to the different region of the composite stamp were presented. The fabrication method of the stamp is also presented. Corresponding experiments were carried out by using this stamp. Kinds of nanostructures were transferred in one inch diameter area with good fidelity. The feature sizes of the structures were less than 100 nm. 2012 IEEE.