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Study of active beam steering system with a simple method 期刊论文
chin. opt. lett., 2014, 卷号: 12, 期号: 8, 页码: 81405
作者:  Wang, Jun;  Huang, Lihua;  Hou, Liying;  He, Guojun;  Song, Qiang
收藏  |  浏览/下载:15/0  |  提交时间:2016/11/28
Study of active beam steering system with a simple method 期刊论文
chin. opt. lett., 2014, 卷号: 12, 期号: 8, 页码: 81405
作者:  Wang, Jun;  Huang, Lihua;  Hou, Liying;  He, Guojun;  Song, Qiang
收藏  |  浏览/下载:13/0  |  提交时间:2016/11/28
Off-line inspection method of microlens array for illumination homogenization in DUV lithography machine 会议论文
international conference on optical instruments and technology - optoelectronic measurement technology and systems
作者:  Zhang Fang;  Zhu Jing;  Yang Baoxi;  Huang Lihua;  Hu Xiaobang
收藏  |  浏览/下载:15/0  |  提交时间:2016/11/28
The beam delivery modeling and error sources analysis of beam stabilization system for lithography 会议论文
international conference on optical instruments and technology - optoelectronic measurement technology and systems
作者:  Wang, Jun;  Huang, Lihua;  Hou, Liying;  He, Guojun;  Ren, Bingqiang
收藏  |  浏览/下载:18/0  |  提交时间:2016/11/28
Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark 期刊论文
chinese optics letters, 2009, 卷号: 7, 期号: 5, 页码: 407-409
Xiaojun Jiang; Huijie Huang; Xiangzhao Wang; Lihua Huang
收藏  |  浏览/下载:1155/251  |  提交时间:2010/05/13
Theoretical model and quantif ication of reflectance photometer 期刊论文
chinese optics letters, 2009, 卷号: 7, 期号: 11
Lihua Huang; Youbao Zhang; Chengke Xie; Jianfeng Qu; Huijie Huang; Xiangzhao Wang
收藏  |  浏览/下载:904/208  |  提交时间:2010/04/26
Non-piece-wise error compensation for grating displacement measurement system with absolute zero mark 期刊论文
chinese optics letters, 2009, 卷号: 7, 期号: 5
Xiaojun Jiang; Huijie Huang; Xiangzhao Wang; Lihua Huang
收藏  |  浏览/下载:1166/242  |  提交时间:2010/04/26
Scattering performance analysis of reflectance photometer for quantifying gold labeled test strips 期刊论文
2008 international conference on optical instruments and technology, 2009, 期号: 7156
Lihua Huang; Youbao Zhang; Chengke Xie; Jianfeng Qu; Huijie Huang; Xiangzhao Wang
收藏  |  浏览/下载:1047/279  |  提交时间:2010/05/13
Calibration method for a photoelastic modulator with a peak retardation of less than a half-wavelength 期刊论文
appl. optics, 2007, 卷号: 46, 期号: 5, 页码: 699, 703
曾爱军; Huang Lihua; Dong Zuoren; Hu Jianming; 黄惠杰; 王向朝
收藏  |  浏览/下载:953/196  |  提交时间:2009/09/24
Encircled energy measurement for focusing lens based on scanning Hartmann test 期刊论文
optik, 2007, 卷号: 118, 期号: 8, 页码: 357, 360
Liu Dan; 黄惠杰; Ren Bingqiang; 曾爱军; Huang Lihua; 王向朝
收藏  |  浏览/下载:972/187  |  提交时间:2009/09/24


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