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浏览/检索结果: 共6条，第1-6条 帮助 限定条件 专题：上海微系统与信息技术研究所    第一署名单位    第一作者单位    通讯作者单位     已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择作者升序作者降序题名升序题名降序发表日期升序发表日期降序提交时间升序提交时间降序 Active roles of helium in the growth of hydrogenated microcrystalline silicon germanium thin films 期刊论文 THIN SOLID FILMS, 2012, 卷号: 520, 期号: 18, 页码: 5940-5945 Zhang, LP; Zhang, JJ; Zhang, X; Cao, Y; Zhao, Y 收藏  |  浏览/下载：25/0  |  提交时间：2013/04/24 Helium dilution  mu c-SiGe:H  Atomic H  Excitation transfer effect  Optical emission spectroscopy   Non-contact repulsive-force excitation for highly endurable wide frequency-range energy-harvesting 期刊论文 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11.2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11, 2011, 页码: 687-690 Yang, Yongliang; Tang, Qiaochu; Li,XX 收藏  |  浏览/下载：37/0  |  提交时间：2012/08/23 NON-CONTACT REPULSIVE-FORCE EXCITATION FOR HIGHLY ENDURABLE WIDE FREQUENCY-RANGE ENERGY-HARVESTING 会议论文 Transducers’11:The 16th International Conference on Solid-State Sensors, Actuators and Microsystems, 2011 Yongliang Yang, Qiaochu Tang, and Xinxin Li 收藏  |  浏览/下载：29/0  |  提交时间：2012/05/04 Resonant-cantilever bio/chemical sensors with an integrated heater for both resonance exciting optimization and sensing repeatability enhancement 期刊论文 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 卷号: 19, 期号: 4, 页码: 45023-45023 Yu, HT; Li, XX; Gan, XH; Liu, YJ; Liu, X; Xu, PC; Li, JG; Liu, M 收藏  |  浏览/下载：17/0  |  提交时间：2011/12/17 FORCE MICROSCOPY  FREQUENCY  MICROCANTILEVERS  EXCITATION  DEPENDENCE   Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation 期刊论文 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2006, 页码: 832-836 Jin, DZ; Liu, H; Li, XX; Liu, M; Zuo, GM; Wang, YL; Yu, HT; Ge, XH 收藏  |  浏览/下载：14/0  |  提交时间：2011/12/17 FREQUENCY STABILITY  MICROCANTILEVERS  TRANSDUCERS  SYSTEMS   Tens femtogram resoluble piezoresistive cantilever sensors with optimized high-mode resonance excitation 期刊论文 2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3, 2006, 页码: 832-836 Jin, DZ; Liu, H; Li, XX; Liu, M; Zuo, GM; Wang, YL; Yu, HT; Ge, XH 收藏  |  浏览/下载：10/0  |  提交时间：2011/12/17 FREQUENCY STABILITY  MICROCANTILEVERS  TRANSDUCERS  SYSTEMS