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A simple linear complementarity approach for sliding cable modeling considering friction 期刊论文
MECHANICAL SYSTEMS AND SIGNAL PROCESSING, 2019, 卷号: 130, 页码: 293-314
作者:  Kan, Ziyun;  Peng, Haijun;  Chen, Biaoshong
收藏  |  浏览/下载:6/0  |  提交时间:2019/12/02
On-line measuring device for measuring small-size wafer polishing friction force, has resistance strain gauge converting elastic strain into electrical signal, which is sent to another strain gauge by collector ring and bridge box. 专利
申请日期: 2011-01-01, 公开日期: 2011-08-17
作者:  WANG K KANG R JIN Z YUAN Z
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/18
A signal processing method for the friction-based endpoint detection system of a CMP process 期刊论文
Journal of Semiconductors, 2010, 卷号: 31, 页码: -
作者:  Chi X.;  Dongming G.;  Zhuji J.;  Renke K.
收藏  |  浏览/下载:2/0  |  提交时间:2019/12/24


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