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科研机构
西安交通大学 [22]
内容类型
期刊论文 [13]
会议论文 [9]
发表日期
2018 [3]
2017 [2]
2016 [1]
2015 [1]
2014 [2]
2013 [3]
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专题:西安交通大学
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An optical fiber Fabry-Perot micro-pressure sensor based on beam-membrane structure
期刊论文
MEASUREMENT SCIENCE AND TECHNOLOGY, 2018, 卷号: 29
作者:
Tian, Bian
;
Zhan, Feng
;
Han, Feng
;
Li, Kaikai
;
Zhao, Na
收藏
  |  
浏览/下载:3/0
  |  
提交时间:2019/11/26
beam-membrane structure
FP cavity
MEMS
micro-pressure
optical fiber sensor
A Manganin Thin Film Ultra-High Pressure Sensor for Microscale Detonation Pressure Measurement
期刊论文
SENSORS, 2018, 卷号: 18
作者:
Zhang, Guodong
;
Zhao, Yulong
;
Zhao, Yun
;
Wang, Xinchen
;
Wei, Xueyong
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/11/26
detonation pressure
manganin thin film
MEMS technology
microscale measurement
ultra-high pressure sensor
Research of a Novel Ultra-High Pressure Sensor with High-Temperature Resistance
期刊论文
MICROMACHINES, 2018, 卷号: 9
作者:
Zhang, Guo-Dong
;
Zhao, Yu-Long
;
Zhao, Yun
;
Wang, Xin-Chen
;
Wei, Xue-Yong
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
high-temperature resistance
microelectromechanical systems (MEMS) technology
silicon-on-insulator (SOI) piezoresistive element
small size
ultra-high pressure sensor
High temperature dynamic pressure sensor and experimental analysis
期刊论文
Shiyan Liuti Lixue/Journal of Experiments in Fluid Mechanics, 2017, 卷号: 31, 页码: 44-50
作者:
Hebibul, Rahman
;
Wang, Hongyan
;
Xue, Fangzheng
;
Huang, Linya
;
Huang, Mimi
收藏
  |  
浏览/下载:8/0
  |  
提交时间:2019/11/26
Flush-type
High frequency
MEMS
SOI inverted cup-type sensitive chip
Uncertainty
Piezoresistive pressure sensor with high sensitivity for medical application using peninsula-island structure
期刊论文
Frontiers of Mechanical Engineering, 2017, 卷号: 12, 页码: 546-553
作者:
Xu, Tingzhong
;
Wang, Hongyan
;
Xia, Yong
;
Zhao, Zhiming
;
Huang, Mimi
收藏
  |  
浏览/下载:6/0
  |  
提交时间:2019/11/26
low pressure sensor
medical application
MEMS
peninsulaisland
ultra-high sensitivity
A high sensitive pressure sensor with the novel bossed diaphragm combined with peninsula-island structure
期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2016, 卷号: 244, 页码: 66-76
作者:
Xu, Tingzhong
;
Zhao, Libo
;
Jiang, Zhuangde
;
Guo, Xin
;
Ding, Jianjun
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/11/26
Peninsula-island structure
Sensitivity
Ultra-low pressure sensor
Non-linearity
MEMS
A high performance micro-pressure sensor based on a double-ended quartz tuning fork and silicon diaphragm in atmospheric packaging
会议论文
作者:
Cheng, Rongjun
;
Li, Cun
;
Zhao, Yulong
;
Li, Bo
;
Tian, Bian
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/02
silicon
packaging
quartz
resonant micro-pressure sensor
MEMS
Achievement of a High-Sensitive and High-Overload Sensor Based on the Bossed-Diaphragm Structure
会议论文
作者:
Yu, Zhongliang
;
Zhao, Yulong
;
Li, Lili
;
Li, Cun
;
Zhou, Guanwu
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/02
high-overload
high-sensitive
micro-pressure
MEMS
Piezoresistive
Design optimization of a high-sensitive absolute micro-pressure sensor
期刊论文
SENSOR REVIEW, 2014, 卷号: 34, 期号: [db:dc_citation_issue], 页码: 312-318
作者:
Yu, Zhongliang
;
Zhao, Yulong
;
Li, Lili
;
Li, Cun
;
Meng, Xiawei
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/03
Pressrue
Sensor
MEMS
Piezoresistive
THE DESIGN AND IMPLEMENTATION OF HIGH PRESSURE RECTANGULAR DIAPHRAGM SENSOR BASED ON MEMS TECHNOLOGY
会议论文
作者:
Niu, Zhe
;
Zhao, Yulong
;
Tian, Bian
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/03
High Pressure sensor
Finite Element Method
Piezoresistive
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