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Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter 期刊论文
J. Opt. Technol., 2017, 卷号: 84, 期号: 5, 页码: 346
作者:  Zhu, Jing;  Xie, Chengke;  Huang, Huijie;  Chen, Ming;  Yang, Baoxi
收藏  |  浏览/下载:28/0  |  提交时间:2017/12/25
Measurement precision improvement for excimer laser pulse energy sensor based on a special finite impulse response filter 期刊论文
J. Opt. Technol., 2017, 卷号: 84, 期号: 5, 页码: 346
作者:  Yang, Baoxi;  Zhu, Jing;  Chen, Ming;  Xie, Chengke;  Huang, Huijie
收藏  |  浏览/下载:25/0  |  提交时间:2017/12/25
Tool influence function in aspheric polishing under dynamic pressure distribution 期刊论文
光学精密工程, 2016, 期号: 12, 页码: 3061
作者:  Xu WD(徐文东);  Li XY(李徐钰);  Wei CY(魏朝阳);  Shao JD(邵建达)
收藏  |  浏览/下载:18/0  |  提交时间:2017/12/25
Compensation of astigmatism in coordinate measurement for optical aspheric elements 期刊论文
光学精密工程, 2016, 期号: 12, 页码: 3012
作者:  Hu C(胡晨);  Wu LQ(吴令奇);  Xu XK(徐学科);  Luo CJ(罗词金);  Fan XM(范晓明)
收藏  |  浏览/下载:34/0  |  提交时间:2017/12/25
Integrated Simulation of Opto-Mechanical System 期刊论文
光学学报, 2016, 卷号: 36, 期号: 7, 页码: 722002
作者:  Xiao Y(肖阳);  Xu WD(徐文东);  Zhao CQ(赵成强)
收藏  |  浏览/下载:13/0  |  提交时间:2017/12/25
Study of Spectral Reflectance Reconstruction Based on an Algorithm for Improved Orthogonal Matching Pursuit 期刊论文
J. Opt. Soc. Korea., 2016, 卷号: 20, 期号: 4, 页码: 515
作者:  Zhang Leihong;  Liang Dong;  Zhang Dawei;  Gao Xiumin;  Ma Xiuhua
收藏  |  浏览/下载:13/0  |  提交时间:2017/12/25
Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image 期刊论文
Appl. Optics, 2016, 卷号: 55, 期号: 12, 页码: 3192
作者:  Zhu, Boer;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong;  Shen, Lina
收藏  |  浏览/下载:24/0  |  提交时间:2017/12/25
Aberration Measurement Method for Hyper-NA Lithographic Projection Lens 期刊论文
光学学报, 2016, 卷号: 36, 期号: 1, 页码: 112002
作者:  Zhu BE(诸波尔);  Wang XC(王向朝);  Li SK(李思坤);  Yan GY(闫观勇);  Shen LN(沈丽娜)
收藏  |  浏览/下载:21/0  |  提交时间:2017/12/25
Research on High Accuracy Sub-Aperture Stitching Algorithm for Flat Optics 期刊论文
中国激光, 2016, 卷号: 43, 期号: 11, 页码: 1104002
作者:  Guo FD(郭福东);  Wang XC(王向朝);  Lu YJ(卢云君);  Tang F(唐锋);  Zhu PH(朱鹏辉)
收藏  |  浏览/下载:17/0  |  提交时间:2017/12/25
Wavefront aberration measurement method for a hyper-NA lithographic projection lens based on principal component analysis of an aerial image 期刊论文
Appl. Optics, 2016, 卷号: 55, 期号: 12, 页码: 3192
作者:  Zhu, Boer;  Wang, Xiangzhao;  Li, Sikun;  Yan, Guanyong;  Shen, Lina
收藏  |  浏览/下载:23/0  |  提交时间:2017/12/25


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