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科研机构
北京大学 [1]
兰州大学 [1]
内容类型
会议论文 [1]
期刊论文 [1]
发表日期
2009 [2]
学科主题
computer a... [1]
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发表日期:2009
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Histological evaluation of osteogenesis of 3D-printed poly-lactic-co-glycolic acid (PLGA) scaffolds in a rabbit model
期刊论文
biomedical materials, 2009
Ge, Zigang
;
Tian, Xianfeng
;
Heng, Boon Chin
;
Fan, Victor
;
Yeo, Jin Fei
;
Cao, Tong
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浏览/下载:2/0
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提交时间:2015/11/10
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Near-field diffraction simulation on three-dimensional mask model with off-axis illumination
会议论文
4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, Chengdu, China, November 19, 2008 - November 21, 2008
作者:
Cheng, Lin
;
Cao, Peng-Fei
;
Liu, Jia
;
Zhang, Xiao-Ping
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浏览/下载:3/0
  |  
提交时间:2017/01/18
Three dimensional
Design
Diffraction
Electromagnetic fields
Electron beam lithography
Manufacture
Optical beam splitters
Optical instruments
Photolithography
Simulators
Testing
3-D defects
3D masks
45nm technology
Azimuth angles
Contact holes
Electromagnetic field simulation
Hyper-NA
Incident angles
Key issues
Lithography simulation
Mask topography effect
Near-field diffraction
Near-field distribution
Oblique incidence angles
Off-axis illumination
Optical proximity corrections
Printing performance
Scalar diffraction theory
Three-dimensional (3-D) simulation
Three-dimensional model
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