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李斯特《三首音乐会练习曲》研究 学位论文
2013, 2013
蔡王冰
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Key techniques of laser direct writing patterns on spherical substrate (EI CONFERENCE) 会议论文
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Feng X.-G.; Zhao J.-L.
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Comparing with the writing method of plane pattern  spherical pattern' has some remarkable different on several points. Firstly  it is difficult to spin-coated a uniform photoresist film on a spherical substrate  especially the ratio of spherical radius to caliber is smaller  and the spin-coated way must match the ratio of spherical radius to caliber. Secondly  if the sphere couldn't be regarded as a plane  a so-called concentric optical scan movement way must be applied for the generation of spherical pattern  because the reflex of substrate will affect the quantity of illumination. Commonly  an alignment technique is indispensable with pattern generation of spherical surface by the concentric optical scan in order to ensure the orthogonal intersection of focusing laser beam and writing surface. Thirdly  a uniform velocity control must be considered for the laser direct writing method on a spherical substrate. Otherwise  the exposure time of photoresist will be different  and the line widths of pattern will be also different at different areas. Fourthly  commonly  because the errors of concentric machine and substrate surface shape are bigger  so focusing servo-control technique is also needful for writing a pattern on a spherical substrate. Focusing servo-control may keep the focal spot on the spherical surface by a focus detection and control system in the course of writing pattern. Using these techniques  we fabricated a line width of 7m and a period of 600m isometric mesh on the concave of a spherical substrate.  


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