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安徽大学 [5]
西安交通大学 [2]
数学与系统科学研究院 [2]
北京航空航天大学 [1]
苏州纳米技术与纳米仿... [1]
河南大学 [1]
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A Novel CMUT-Based Resonant Biochemical Sensor Using Electrospinning Technology
期刊论文
IEEE TRANSACTIONS ON INDUSTRIAL ELECTRONICS, 2019, 卷号: 66, 页码: 7356-7365
作者:
Zhao, Libo
;
Zhao, Yihe
;
Xia, Yong
;
Li, Zhikang
;
Li, Jie
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/30
Capacitive micromachined ultrasonic transducer (CMUT)-based resonant biochemical sensor
electrospinning technology
impedance characteristics
resonant frequency shift
volume sensitivity
Optimization on benzocyclobutene-based CMUT fabrication with an inverse structure
期刊论文
SENSORS AND ACTUATORS A-PHYSICAL, 2018, 卷号: 281, 页码: 1-8
作者:
Li, Zhenhao
;
Na, Shuai
;
Chen, Albert I. H.
;
Wong, Lawrence L. P.
;
Sun, Zhendong
收藏
  |  
浏览/下载:33/0
  |  
提交时间:2018/11/16
Capacitive micromachined ultrasonic transducer
Adhesive wafer bonding
Photosensitive benzocyclobutene
Resonator
Development of a Novel CMUT-Based Concentric Dual-Element Ultrasonic Transducer: Design, Fabrication, and Characterization
期刊论文
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2018, 卷号: 27, 期号: 3, 页码: 538-546
作者:
Zheng, Zhou
;
Na, Shuai
;
Chen, Albert I. -Hsiang
;
Li, Zhenhao
;
Wong, Lawrence L. P.
收藏
  |  
浏览/下载:34/0
  |  
提交时间:2018/07/30
Annular element
capacitive micromachined ultrasonic transducer (CMUT)
concentric
deep reactive-ion etching
dual-element
hybrid transducer
Monolithic Multiband CMUTs for Photoacoustic Computed Tomography with In Vivo Biological Tissue Imaging
期刊论文
IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2018, 卷号: 65, 期号: 3, 页码: 465-475
作者:
Pun, Sio Hang
;
Yu, Yuanyu*
;
Zhang, Jian
;
Wang, Jiujiang
;
Cheng, Ching-Hsiang
收藏
  |  
浏览/下载:7/0
  |  
提交时间:2019/12/04
Capacitive micromachined ultrasonic transducer (CMUT)
multiband CMUT
photoacoustic computed tomography (PACT)
Finite Element Simulation and Analysis of Capacitive Micromachined Ultrasonic Transducer
会议论文
International Conference on Electrical Engineering and Automation (ICEEA)
作者:
Guo, Qing[1]
;
Gao, Shang[2]
;
Li, Yan[3]
;
Zhang, Pei-yu[4]
收藏
  |  
浏览/下载:4/0
  |  
提交时间:2019/12/23
Capacitive micromachined ultrasonic transducer
Simulation
Resonant frequency
Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient
期刊论文
Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4
作者:
Miao, J(苗静)
;
Shen, WJ(沈文江)
;
He, CD
;
Xue, CY
;
Xiong, JJ
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  |  
浏览/下载:80/0
  |  
提交时间:2015/12/31
silicon
elemental semiconductors
silicon-on-insulator
wafer bonding
electromechanical effects
ultrasonic transducers
capacitive transducers
micromechanical devices
micromachining
vibrations
membranes
finite element analysis
reliability
capacitance
electromechanical coupling coefficient
capacitive micromachined ultrasonic transducer
impedance matching
propagation medium
microelectromechanical system capacitive ultrasonic transducer
silicon on insulator
wafer bonding
optimum geometric dimensions
membrane mechanical vibration
electrical characteristics
finite-element analysis
operation mode
device safety
device reliability
equivalent stress
operation-collapse voltage
bottom electrodes
glass substrate surface
parallel parasitic capacitance
Si
SiO2
Calculation of equivalent parameters in CMUT 1-D theoretical model
会议论文
作者:
Zhou, Wenchao
;
Yu, Ting
;
Yu, Fengqi
收藏
  |  
浏览/下载:1/0
  |  
提交时间:2019/12/18
Alternative solutions
Capacitive micromachined ultrasonic transducer
Circular membranes
Equivalent model
Equivalent parameters
Pull-in voltage
Reduced order models
Theoretical modeling
A 1-D lumped theoretical model for CMUT
会议论文
作者:
Zhou, Wenchao
;
Yu, Ting
;
Yu, Fengqi
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/12/18
Capacitive micromachined ultrasonic transducer
CMUT
Computational costs
Computational time
Finite element method analysis
Lumped modeling
Prototype manufacturing
Theoretical modeling
Theoretical model and optimal design of silicon micromachined ultrasonic imaging transducers
期刊论文
Science in China. Series E: Technological Sciences, 2007, 卷号: Vol.50 NO.5, 页码: 674-682
作者:
LiFeng Ge
收藏
  |  
浏览/下载:5/0
  |  
提交时间:2019/04/22
micromachined
electrostatic
ultrasonic
transducer
micromachined
capacitive
ultrasonic
transducer
ultrasonic
imaging
transducer
model
optimal
design
A novel design of micromachined capacitive Lamb wave transducers - art. no. 63581I
期刊论文
Sensors, Automatic Measurement, Control, and Computer Simulation, Pts 1 and 2, 2006, 卷号: Vol.6358, 页码: I3581
作者:
Ge Lifeng
收藏
  |  
浏览/下载:2/0
  |  
提交时间:2019/04/24
capacitive
Lamb
wave
transducer
micromachined
capacitive
ultrasonic
transducer
groove
ultrasonic
transducer
exciting
mechanism
optimal
design
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