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浏览/检索结果: 共7条，第1-7条 帮助 已选(0)清除 条数/页：5101520253035404550556065707580859095100   排序方式：请选择发表日期升序发表日期降序作者升序作者降序提交时间升序提交时间降序题名升序题名降序 单元机组的非线性协调控制器 期刊论文 2010, 2010 顾红艳; 李东海; 宁喜荣; 薛亚丽; 杨献勇; GU Hong-yan; LI Dong-hai; NING Xi-rong; XUE Ya-li; YANG Xian-yong 收藏  |  浏览/下载：2/0 循环流化床锅炉燃烧系统的多变量控制 期刊论文 2010, 2010 马素霞; 薛亚丽; MA Su-xia; XUE Ya-li 收藏  |  浏览/下载：1/0 基于主元分析的热力系统传感器故障检测指标 期刊论文 2010, 2010 邱天; 丁艳军; 吴占松; QIU Tian; DING Yan-jun; WU Zhan-song 收藏  |  浏览/下载：2/0 Automatic testing equipment and experiments based on the quantitative shadow method for measuring sub-nanometer deformations on aspheric surface 期刊论文 2010, 2010 Ke Xin; Wei Zuo; Zhijing Feng 收藏  |  浏览/下载：3/0 Design and implementation of automatic comprehensive performance measurement system for emulsion pump 期刊论文 2010, 2010 Feng Pingfa; Xu Daochun; Lu Guanyu; Zhou Xijie; Li Xuewei 收藏  |  浏览/下载：2/0 Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L. 收藏  |  浏览/下载：19/0  |  提交时间：2013/03/25 Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer  for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS  an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively  valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed  acceleration and viscosity of the photoresist. After development  the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate  the film thickness error was within 1%  and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater  which contributes to quality improvement of laser direct writing lines on CSS.   Analysis and design of an automatic-current-sharing control based on average-current mode for parallel boost converters (CPCI-S收录) 会议论文 IPEMC 2006: CES/IEEE 5TH INTERNATIONAL POWER ELECTRONICS AND MOTION CONTROL CONFERENCE, VOLS 1-3, CONFERENCE PROCEEDINGS 作者:  Xiao, Wenxun[1];  Zhang, Bo[1];  Qiu, Dongyuan[1] 收藏  |  浏览/下载：0/0  |  提交时间：2019/04/18 average-current mode  automatic-current-sharing technique  three-loop control